The efficiency of photon collection from optically active defect centers in bulk diamond is greatly reduced by refraction at the diamond-air interface. We report on the fabrication and measurement of a geometrical solution to the problem; integrated solid immersion lenses (SILs) etched directly into the surface of diamond. An increase of a factor of 10 was observed in the saturated count-rate from a single negatively charged nitrogen-vacancy (NV−) within a 5 μm diameter SIL compared with NV−’s under a planar surface in the same crystal. Such a system is potentially scalable and easily adaptable to other defect centers in bulk diamond.

We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an $8\mu \text{m}$ diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

Exploring the maximum spatial resolution achievable in far-field optical imaging, we show that applying solid immersion lenses (SIL) in stimulated emission depletion (STED) microscopy addresses single spins with a resolution down to 2.4 ± 0.3 nm and with a localization precision of 0.09 nm.

Diamond is a promising platform for sensing and quantum processing owing to the remarkable properties of the nitrogen-vacancy (NV) impurity. The electrons of the NV center, largely localized at the vacancy site, combine to form a spin triplet, which can be polarized with 532 nm laser light, even at room temperature. The NV’s states are isolated from environmental perturbations making their spin coherence comparable to trapped ions. An important breakthrough would be in connecting, using waveguides, multiple diamond NVs together optically. However, still lacking is an efficient photonic fabrication method for diamond akin to the photolithographic methods that have revolutionized silicon photonics. Here, we report the first demonstration of three dimensional buried optical waveguides in diamond, inscribed by focused femtosecond high repetition rate laser pulses. Within the waveguides, high quality NV properties are observed, making them promising for integrated magnetometer or quantum information systems on a diamond chip.

Single-crystal diamond cavity optomechanical devices are a promising example of a hybrid quantum system: by coupling mechanical resonances to both light and electron spins, they can enable new ways for photons to control solid-state qubits. However, realizing cavity optomechanical devices from high-quality diamond chips has been an outstanding challenge. Here, we demonstrate single-crystal diamond cavity optomechanical devices that can enable photon–phonon spin coupling. Cavity optomechanical coupling to 2 GHz frequency ($f_{\mathrm{m}}$) mechanical resonances is observed. In room-temperature ambient conditions, these resonances have a record combination of low dissipation (mechanical quality factor, $Q_{\mathrm{m}}>9000$) and high frequency, with $Q_{\mathrm{m}}·f_{\mathrm{m}}\sim 1.9\times {10}^{13}$, which is sufficient for room-temperature single-phonon coherence. The system exhibits high optical quality factor ($Q_{\mathrm{o}}>{10}^4$) resonances at infrared and visible wavelengths, is nearly sideband resolved, and exhibits optomechanical cooperativity $C\sim 3$. The devices’ potential for optomechanical control of diamond electron spins is demonstrated through radiation pressure excitation of mechanical self-oscillations whose 31 pm amplitude is predicted to provide 0.6 MHz coupling rates to diamond nitrogen vacancy center ground-state transitions (6 Hz/phonon) and $\sim {10}^5$ stronger coupling rates to excited-state transitions.

Diamond’s nitrogen vacancy (NV) center is an optically active defect with long spin coherence times, showing great potential for both efficient nanoscale magnetometry and quantum information processing schemes. Recently, both the formation of buried 3D optical waveguides and high-quality single NVs in diamond were demonstrated using the versatile femtosecond laser-writing technique. However, until now, combining these technologies has been an outstanding challenge. In this Letter, we fabricate laser-written photonic waveguides in quantum grade diamond which are aligned to within micron resolution to single laser-written NVs, enabling an integrated platform providing deterministically positioned waveguide-coupled NVs. This fabrication technology opens the way toward on-chip optical routing of single photons between NVs and optically integrated spin-based sensing.