In this paper, polystyrene microspheres were firstly prepared by seeded emulsion polymerization, and the uniform monolayer of polystyrene microspheres was prepared on the substrate by the dipping method. Then, polystyrene monolayer film was used as a mask and a low dimensional array structure of gold was prepared by bottom-up self-assembly process. After that, the method of solution etching and annealing was used, and the gold nanoparticle array was post-processed. As a result, gold nanoparticles were recrystallized, with an average diameter of about 50 nm. Subsequently, the semiconductor process was adopted, with focused ion beams induced deposition and electron beam evaporation, and single electron transistors were fabricated, based on self-assembled gold nanoparticles. Finally, the devices were fixed in a liquid helium cryostat and Coulomb blockade was observed at 320 mK. It is a novel fabrication of a single electron transistor based on gold nanoparticle array template and prepared with polystyrene nanospheres.

The integrated structure of graphene single-electron transistor and nanostrip electrometer was prepared using the semiconductor fabrication process. Through the electrical performance test of the large sample number, qualified devices were selected from low-yield samples, which exhibited an obvious Coulomb blockade effect. The results show that the device can deplete the electrons in the quantum dot structure at low temperatures, thus, accurately controlling the number of electrons captured by the quantum dot. At the same time, the nanostrip electrometer coupled with the quantum dot can be used to detect the quantum dot signal, that is, the change in the number of electrons in the quantum dot, because of its quantized conductivity characteristics.

By designing and fabricating a narrow-band Fabry-Perot multi-beam interference spectroscopic microcavity array, and integrating it with a visible light detector focal plane array, we demonstrate a small compact multispectral imaging detector. The micro-cavity filter array with 4×4 basic repeating units and a total of 2048×2048 pixels is obtained on a quartz substrate by the four-fractal combination lithograph-etching process. Then the micro miniatured multispectral imaging detector is formed by fitting with the detector chip. The depth and precision of the etching will determine the distribution and offset of the central wavelength of the narrowband spectral channel respectively. The results show that the etching rate of reactive ion is (3.6 ± 0.2) Å/s, and the process is stable and controllable. Due to the different etching depths, the basic repeating unit forms 16 different levels of steps, and the process achieves the design expectation well.The results are obtained as follows: the response spectrum peak of the microcavity array sample varies from 520 to 680 nm, the free spectrum range is 160 nm, the full width at the half-peak is less than 10 nm, the transmittance is about 70%, the relative half-width of the transmittance peak at 590 nm is 1.19%, and the waveform coefficient is 2.78. A 16-channel multispectral camera is constructed by using the optical micro-precision assembly device to realize the precise alignment and the fitting of the micro-cavity filter array and the image sensor. Xenon lamp and monochromator are used as tunable wavelength monochromatic cooperative light source to detect the effect of 16-channel snapshot multispectral imaging on a pixel scale. The results show that the multispectral imaging detector has 16 different narrow-band response spectra. The characteristic spectrum of the target can be clearly distinguished by spectral channel.When imaging the target with known spectral characteristics, for a certain frame of multi-spectral image, selecting a suitable spectral channel can eliminate the background in the field of view through image subtraction and improve the contrast of the target. In the dark room condition, we take the LED light source with center wavelength varying in a range between 528 and 589 nm as the target (the wavelength coincides with the working wavelength of the spectral channel), and effectively suppress the background through the spectral differential intensity subtraction, which can improve the accuracy and sensitivity of the target capture. The 16-channel snapshot multi-spectral imaging detector based on integrated Fabry-Perot microcavity array has the advantages of small size, high integration and strong environmental adaptability, and is expected to play a role in realizing the real-time detection of weak moving targets, auxiliary diagnosis of skin surface observation, and high dynamic range imaging of target observation under backlight conditions.