Ron Quan

Mr. Ron Quan

Stanford University, Stanford, California, USA

Research Focus & Metrics

Academic Career Length

5Years (2022-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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20 August 2022 in Micromachines
Verified
Journal Article
Open access
PDF file
SMSandra N. Manosalvas-Kjono
Sandra N. Manosalvas-Kjono
RQRon Quan
Ron Quan
OSOlav Solgaard
Olav Solgaard
Micro-actuators driven on resonance maximize reach and speed; however, due to their sensitivity to environmental factors (e.g., temperature and air pressure), the amplitude and phase response must be monitored to achieve an accurate actuator position. We introduce an MEMS (microelectromechanical system) amplitude and phase monitor (MAPM) with a signal-to-noise ratio of 51 dB and 11.0 kHz bandwidth, capable of simultaneously driving and sensing the movement of 1D and 2D electrostatically driven micro-actuators without modifying the chip or its packaging. The operational principle is to electromechanically modulate the amplitude of a high-frequency signal with the changing capacitance of the micro-actuator. MAPM operation is characterized and verified by simultaneously measuring the amplitude and phase frequency response of commercial micromirrors. We demonstrate that the MAPM circuitry is insensitive to complex relationships between capacitance and position of the MEMS actuators, and it is capable of giving real-time read-out of the micromirror motion. Our measurements also reveal and quantify observations of phase drift and crosstalk in 2D resonant operation. Measurements of phase changes over time under normal operation also verify the need for phase monitoring. The open-loop, high-sensitivity position sensor enables detailed characterization of dynamic micro-actuator behavior, leading to new insights and new types of operation, including improved control of nonlinear motion.
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