Superconducting thin films were prepared on and MgO(100) substrates. Boron thin films were deposited by the electron-beam evaporation followed by postannealing process with magnesium. Proper postannealing conditions were investigated to grow good superconducting thin films. The x-ray diffraction patterns showed randomly oriented growth of phase in our thin films. The surface morphology was examined by scanning electron microscope and atomic force microscope. Critical current density measured by transport method was about at 15 K, and superconducting transition temperature was ∼39 K in the thin films on