The paper proposes a three-degrees-of-freedom flexible nano-positioning stage constructed from compliant flexures and piezoelectric thin-sheet actuators, featuring a compact size and fast dynamic responses, which can be extensively applied to the typical micro/nano-positioning applications. Meanwhile, the dynamic model of the flexible PZT nano-positioning with distributed parameter characteristics is established to distinctly reflect the piezoelectric–mechanical coupling relationship between the four flexible PZT actuators and the three outputs of such a system. Furthermore, the attitude decoupling control for the 3-DOF flexible piezoelectric nano-positioning stage is achieved by the Active Disturbance Rejection Control (ADRC) method to compensate for the positioning errors in the actual positioning process. After this, a real-time experimental apparatus with two Position-Sensitive Detectors (PSDs) is also proposed and fabricated to test the three outputs of the flexible piezoelectric thin-sheet (PZT-5A) nano-positioning stage and validate the effectiveness of the dynamic modeling method and attitude decoupling control in the piezoelectric nano-positioning stage ranges.

To further enhance the performance of the fast tool servo (FTS) system in terms of stroke, load capacity, and application area, this paper proposes a novel fast tool servo device driven by a voice coil motor (VCM), based on a three-segment uniform corrugated flexure (CF) guiding mechanism, with a large stroke, high accuracy, and high dynamics. To describe the unified static characteristics of such device, the compliance matrix method is applied to establish its model, where the influence of CF beam structural parameters on the FTS device is investigated in detail. Furthermore, resolution and positioning accuracy tests are conducted to validate the features of the system. The testing results indicate that the maximum stroke of the FTS device is up to 3.5 mm and the positioning resolution values are 3.6 μm and 2.4 μm for positive and negative stroke, respectively, which further verifies the device’s effectiveness and promising application prospect in ultra-precision microstructure machining.