Digital holographic microscopy (DHM) is a topographic measurement technique that permits full-field, nondestructive, dynamic, quantitative amplitude, and phase-contrast imaging. The technique may realize the lateral resolution with submicron scale and the longitudinal resolution with subnanometer scale, respectively. Improving imaging quality has always been the research focus in DHM since it has a direct effect on the precise topographic measurement. In this paper, the recent progress on phase aberration compensation and coherent noise suppression is reviewed. Included in this review are the hologram spectrum’s centering judgment methods of side band in tilt phase error compensation, the physical and numerical compensation methods in phase aberration compensation, and the single-shot digital process methods in coherent noise suppression. The summaries and analyses for these approaches can contribute to improving the imaging quality and reducing the measurement error of DHM, which will further promote the wider applications of DHM in the topographic measurement fields, such as biology and micro-electro mechanical systems.

While color-coding methods have improved the measuring efficiency of a structured light three-dimensional (3D) measurement system, they decreased the measuring accuracy significantly due to lateral chromatic aberration (LCA). In this study, the LCA in a structured light measurement system is analyzed, and a method is proposed to compensate the error caused by the LCA. Firstly, based on the projective transformation, a 3D error map of LCA is constructed in the projector images by using a flat board and comparing the image coordinates of red, green and blue circles with the coordinates of white circles at preselected sample points within the measurement volume. The 3D map consists of the errors, which are the equivalent errors caused by LCA of the camera and projector. Then in measurements, error values of LCA are calculated and compensated to correct the projector image coordinates through the 3D error map and a tri-linear interpolation method. Eventually, 3D coordinates with higher accuracy are re-calculated according to the compensated image coordinates. The effectiveness of the proposed method is verified in the following experiments.

Point cloud registration is a key process in multi-view 3D measurements. Its precision affects the measurement precision directly. However, in the case of the point clouds with non-overlapping areas or curvature invariant surface, it is difficult to achieve a high precision. A high precision registration method based on sphere feature constraint is presented to overcome the difficulty in the paper. Some known sphere features with constraints are used to construct virtual overlapping areas. The virtual overlapping areas provide more accurate corresponding point pairs and reduce the influence of noise. Then the transformation parameters between the registered point clouds are solved by an optimization method with weight function. In that case, the impact of large noise in point clouds can be reduced and a high precision registration is achieved. Simulation and experiments validate the proposed method.

A novel, to the best of our knowledge, hole radius and spacing measurement method is presented based on binocular vision combined with dynamic local plane for the large-size workpiece with plane feature. The novel method overcomes the problem of the ariable working distance and large location error of an abrupt edge for conventional methods. Its measurement principle and model are introduced. Then, a chamfered inner edge extraction method based on the shrinkage of an elliptical band and an adaptive weight optimal calculation based on redundant measurement data are presented to improve the measurement accuracy. Experiments are carried out to validate the presented method, and a high measurement accuracy with a standard deviation of 0.017 mm in the hole radius and 0.021 mm in hole spacing have eventually been achieved for the actual measurement workpieces, respectively. Compared with the common method, the measurement accuracy is improved by at least 77% and 53% in radius and spacing, respectively.