Ron Van Ostayen

Dr. Ron Van Ostayen

Department of Precision and Microsystems Engineering, Faculty of Mechanical, Maritime and Materials Engineering, Delft University of Technology, Delft, 2628CD, the Netherlands
orcid

Research Focus & Metrics

Academic Career Length

23Years (2004-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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1 March 2007 in Tribology International
Verified
Journal Article
Closed access
AKAlex de Kraker
Alex de Kraker
RORon Van Ostayen
Ron Van Ostayen
DRDaniel J. Rixen
Daniel J. Rixen

1 November 2010 in Tribology International
Verified
Journal Article
Closed access
AKA. de Kraker
A. de Kraker
RORon Van Ostayen
Ron Van Ostayen
DRD.J. Rixen
D.J. Rixen

1 October 2020 in Tribology International
Verified
Journal Article
Open access
KWKaroen van der Wal
Karoen van der Wal
RORon Van Ostayen
Ron Van Ostayen
SLStefan G.E. Lampaert
Stefan G.E. Lampaert

1 August 2020 in Tribology International
Verified
Journal Article
Open access
ACA. Codrignani
A. Codrignani
DSD. Savio
D. Savio
LPL. Pastewka
L. Pastewka
BFB. Frohnapfel
B. Frohnapfel
RORon Van Ostayen
Ron Van Ostayen

1 October 2004 in Tribology International
Verified
Journal Article
Closed access
TLT.S. Luong
T.S. Luong
WPW. Potze
W. Potze
JPJ.B. Post
J.B. Post
RORon Van Ostayen
Ron Van Ostayen
ABA. van Beek
A. van Beek

1 November 2018 in ISA Transactions
Verified
Journal Article
Open access
MKMartijn E. Krijnen
Martijn E. Krijnen
RORon Van Ostayen
Ron Van Ostayen
HHHassan HosseinNia
Hassan HosseinNia
Industry pushes towards ever faster and more accurate production of thin substrates. Contactless positioning offers advantages, especially in terms of risk of breakage and contamination. A system is considered designed for contactless positioning by floating a silicon wafer on a thin film of air. This paper focuses on the design of a control system, including actuators, sensors and control method, suitable for this purpose. Two cascaded control loops, with decoupled SISO controllers, are implemented for this moving mass controlled on a mass-spring system, which can be modelled as a fourth order system. The SISO controllers are first designed with classic loopshaping tools, which are then modified using fractional control. Two arguments based on examples in this system are given for the application of fractional control. Firstly, to increase the bandwidth of a regular mass-spring system, and secondly to control a plant which behaves fundamentally fractional, such as the moving mass in this cascaded fourth order system. By merely the application of fractionality, the bandwidths are extended by 14.6 % and 62 %, for the inner and outer loop respectively. A closed-loop positioning bandwidth of the wafer of 60Hz is achieved, resulting in a positioning error of 104nm (2σ value), which is limited by sensor noise and pressure disturbances. This paper shows how the extension of classic loopshaping tools with fractional control can directly improve the performance, without adding to the complicatedness of the control system. Moreover it demonstrates a working concept of a novel type of contactless actuator.