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Prof. Jose-luis Sanchez-rojas
University of Castilla-la Mancha (Spain)

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0 Miniaturization
0 Actuators and Sensors
0 nanotechnologies
0 Microsystems Technologies
0 Piezoelectric MEMS

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Journal article
Published: 18 February 2021 in Actuators
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This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators. The structures consisted of aluminum-nitride (AlN) piezoelectric film on top of millimeter-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimized for travelling or standing wave generation, while the addition of 3D-printed legs allowed for a controlled contact and amplified displacement, a further step into the manufacturing of efficient linear motors. Such hybrid devices have recently demonstrated the conveyance of sliders of several times the motor weight, with speeds of 1.7 mm/s by travelling waves generated at 6 V and 19.3 kHz. In this paper both travelling and standing wave motors are compared. By the optimization of various aspects of the device such as the vibrational modes, leg collocation and excitation signals, speeds as high as 35 mm/s, and payloads above 10 times the motor weight were demonstrated. The devices exhibited a promising positional resolution while actuated with only a few sinusoidal cycles in an open-loop configuration. Discrete steps as low as 70 nm were measured in the conveyance of 2-mg sliders.

ACS Style

Víctor Ruiz-Díez; Jorge Hernando-García; Javier Toledo; Abdallah Ababneh; Helmut Seidel; José Sánchez-Rojas. Piezoelectric MEMS Linear Motor for Nanopositioning Applications. Actuators 2021, 10, 36 .

AMA Style

Víctor Ruiz-Díez, Jorge Hernando-García, Javier Toledo, Abdallah Ababneh, Helmut Seidel, José Sánchez-Rojas. Piezoelectric MEMS Linear Motor for Nanopositioning Applications. Actuators. 2021; 10 (2):36.

Chicago/Turabian Style

Víctor Ruiz-Díez; Jorge Hernando-García; Javier Toledo; Abdallah Ababneh; Helmut Seidel; José Sánchez-Rojas. 2021. "Piezoelectric MEMS Linear Motor for Nanopositioning Applications." Actuators 10, no. 2: 36.

Journal article
Published: 09 February 2021 in Micromachines
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The use of wave-based locomotion mechanisms is already well established in the field of robotics, using either standing waves (SW) or traveling waves (TW). The motivation of this work was to compare both the SW- and the TW-based motion of a 20-mm long sub-gram glass plate, with attached 3D printed legs, and piezoelectric patches for the actuation. The fabrication of the robot did not require sophisticated techniques and the speed of motion was measured under different loading conditions. In the case of the TW mechanism, the influence of using different pairs of modes to generate the TW on the locomotion speed has been studied, as well as the effect of the coupling of the TW motion and the first flexural vibration mode of the legs. This analysis resulted in a maximum unloaded speed of 6 bodylengths/s (BL/s) at 65 V peak-to-peak (Vpp). The SW approach also examined different modes of vibration and a speed of locomotion as high as 14 BL/s was achieved, requiring, unlike the TW case, a highly precise location of the legs on the glass supporting platform and a precise tuning of the excitation frequency.

ACS Style

Jorge Hernando-García; Jose García-Caraballo; Víctor Ruiz-Díez; Jose Sánchez-Rojas. Comparative Study of Traveling and Standing Wave-Based Locomotion of Legged Bidirectional Miniature Piezoelectric Robots. Micromachines 2021, 12, 171 .

AMA Style

Jorge Hernando-García, Jose García-Caraballo, Víctor Ruiz-Díez, Jose Sánchez-Rojas. Comparative Study of Traveling and Standing Wave-Based Locomotion of Legged Bidirectional Miniature Piezoelectric Robots. Micromachines. 2021; 12 (2):171.

Chicago/Turabian Style

Jorge Hernando-García; Jose García-Caraballo; Víctor Ruiz-Díez; Jose Sánchez-Rojas. 2021. "Comparative Study of Traveling and Standing Wave-Based Locomotion of Legged Bidirectional Miniature Piezoelectric Robots." Micromachines 12, no. 2: 171.

Conference paper
Published: 20 November 2020 in Proceedings of 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications
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This document reports the design, fabrication and performance of miniaturized locomotion systems employing flexible materials and 3D printed legs. The movement of the system was achieved by the first extensional mode of vibration of the platform of the robot and the inclination of the supporting legs. The structures were manufactured using a 30-mm-long piezoelectric polyvinylidene fluoride (PVDF) film as the robot platform, with manually added legs fabricated by stereolithography (SLA). Several speed measurements were performed for samples of 1- and 2-mm-long legs, at an angle of inclination of 45° and 60° to the PVDF film. The system was able to exceed a speed of 1 BL/s (body-lengths per second) to 25 V.

ACS Style

David Robles-Cuenca; Víctor Ruiz-Díez; José Luis Sánchez-Rojas; Jorge Hernando-García. Sub-Gram In-Plane Vibration-Driven Robot with Inclined Legs. Proceedings of 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications 2020, 64, 7 .

AMA Style

David Robles-Cuenca, Víctor Ruiz-Díez, José Luis Sánchez-Rojas, Jorge Hernando-García. Sub-Gram In-Plane Vibration-Driven Robot with Inclined Legs. Proceedings of 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications. 2020; 64 (1):7.

Chicago/Turabian Style

David Robles-Cuenca; Víctor Ruiz-Díez; José Luis Sánchez-Rojas; Jorge Hernando-García. 2020. "Sub-Gram In-Plane Vibration-Driven Robot with Inclined Legs." Proceedings of 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications 64, no. 1: 7.

Conference paper
Published: 20 November 2020 in Proceedings of 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications
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This paper reports the design, fabrication and performance of Micro-electromechanical Systems (MEMS) piezoelectric bidirectional conveyors featuring 3D-printed legs in bridge resonators. The structures consisted of aluminium-nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for wave generation, while the addition of 3D-printed legs, for a controlled contact, allowed for a further step into the manufacturing of efficient linear motors. Such hybrid devices have recently demonstrated the conveyance of sliders—surpassing several times the motor weight—with speeds of 1.7 mm/s while operated at 6 V and 19.3 kHz. However, by the optimisation of various aspects of the device such as the vibrational modes and excitation signals, speeds above 25 mm/s were demonstrated.

ACS Style

Víctor Ruiz-Díez; Jorge Hernando-García; José Luis Sánchez-Rojas. Linear Motors Based on Piezoelectric MEMS. Proceedings of 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications 2020, 64, 9 .

AMA Style

Víctor Ruiz-Díez, Jorge Hernando-García, José Luis Sánchez-Rojas. Linear Motors Based on Piezoelectric MEMS. Proceedings of 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications. 2020; 64 (1):9.

Chicago/Turabian Style

Víctor Ruiz-Díez; Jorge Hernando-García; José Luis Sánchez-Rojas. 2020. "Linear Motors Based on Piezoelectric MEMS." Proceedings of 1st International Electronic Conference on Actuator Technology: Materials, Devices and Applications 64, no. 1: 9.

Editorial
Published: 13 July 2020 in Micromachines
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Advances in miniaturization of sensors, actuators, and smart systems are receiving substantial industrial attention, and a wide variety of transducers are commercially available or possess high potential to impact emerging markets

ACS Style

Jose Luis Sanchez-Rojas. Editorial of Special Issue “Piezoelectric Transducers: Materials, Devices and Applications”. Micromachines 2020, 11, 678 .

AMA Style

Jose Luis Sanchez-Rojas. Editorial of Special Issue “Piezoelectric Transducers: Materials, Devices and Applications”. Micromachines. 2020; 11 (7):678.

Chicago/Turabian Style

Jose Luis Sanchez-Rojas. 2020. "Editorial of Special Issue “Piezoelectric Transducers: Materials, Devices and Applications”." Micromachines 11, no. 7: 678.

Journal article
Published: 20 May 2020 in Micromachines
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This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium–nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for TW generation in three frequency ranges: 19, 112 and 420 kHz, by the proper combination of two contiguous flexural modes. After fabrication, the generated TW were characterized by means of Laser–Doppler vibrometry to obtain the relevant tables of merit, such as the standing wave ratio and the average amplitude. The experimental results agreed with the simulation, showing the generation of a TW with an amplitude as high as 6 nm/V and a standing wave ratio as low as 1.46 for a device working at 19.3 kHz. The applicability of the fabricated linear actuator device as a conveyor was investigated. Its kinetic performance was studied with sliders of different mass, being able to carry a 35 mg silicon slider, 18 times its weight, with 6 V of continuous sinusoidal excitation and a speed of 0.65 mm/s. A lighter slider, weighting only 3 mg, reached a mean speed of 1.7 mm/s at 6 V. In addition, by applying a burst sinusoidal excitation comprising 10 cycles, the TW generated in the bridge surface was able to move a 23 mg slider in discrete steps of 70 nm, in both directions, which is a promising result for a TW piezoelectric actuator of this size.

ACS Style

Víctor Ruiz-Díez; Jorge Hernando-García; Javier Toledo; Abdallah Ababneh; Helmut Seidel; José Luis Sánchez-Rojas. Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates. Micromachines 2020, 11, 517 .

AMA Style

Víctor Ruiz-Díez, Jorge Hernando-García, Javier Toledo, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas. Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates. Micromachines. 2020; 11 (5):517.

Chicago/Turabian Style

Víctor Ruiz-Díez; Jorge Hernando-García; Javier Toledo; Abdallah Ababneh; Helmut Seidel; José Luis Sánchez-Rojas. 2020. "Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates." Micromachines 11, no. 5: 517.

Journal article
Published: 20 March 2020 in Micromachines
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This article reports on the locomotion performance of a miniature robot that features 3D-printed rigid legs driven by linear traveling waves (TWs). The robot structure was a millimeter-sized rectangular glass plate with two piezoelectric patches attached, which allowed for traveling wave generation at a frequency between the resonant frequencies of two contiguous flexural modes. As a first goal, the location and size of the piezoelectric patches were calculated to maximize the structural displacement while preserving a standing wave ratio close to 1 (cancellation of wave reflections from the boundaries). The design guidelines were supported by an analytical 1D model of the structure and could be related to the second derivative of the modal shapes without the need to rely on more complex numerical simulations. Additionally, legs were bonded to the glass plate to facilitate the locomotion of the structure; these were fabricated using 3D stereolithography printing, with a range of lengths from 0.5 mm to 1.5 mm. The optimal location of the legs was deduced from the profile of the traveling wave envelope. As a result of integrating both the optimal patch length and the legs, the speed of the robot reached as high as 100 mm/s, equivalent to 5 body lengths per second (BL/s), at a voltage of 65 Vpp and a frequency of 168 kHz. The blocking force was also measured and results showed the expected increase with the mass loading. Furthermore, the robot could carry a load that was 40 times its weight, opening the potential for an autonomous version with power and circuits on board for communication, control, sensing, or other applications.

ACS Style

Jorge Hernando-García; Jose Luis García-Caraballo; Víctor Ruiz-Díez; Jose Luis Sánchez-Rojas. Motion of a Legged Bidirectional Miniature Piezoelectric Robot Based on Traveling Wave Generation. Micromachines 2020, 11, 321 .

AMA Style

Jorge Hernando-García, Jose Luis García-Caraballo, Víctor Ruiz-Díez, Jose Luis Sánchez-Rojas. Motion of a Legged Bidirectional Miniature Piezoelectric Robot Based on Traveling Wave Generation. Micromachines. 2020; 11 (3):321.

Chicago/Turabian Style

Jorge Hernando-García; Jose Luis García-Caraballo; Víctor Ruiz-Díez; Jose Luis Sánchez-Rojas. 2020. "Motion of a Legged Bidirectional Miniature Piezoelectric Robot Based on Traveling Wave Generation." Micromachines 11, no. 3: 321.

Journal article
Published: 19 March 2020 in Actuators
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Piezoelectric actuators have achieved remarkable progress in many fields, being able to generate forces or displacements to perform scanning, tuning, manipulating, tactile sensing or delivering functions. In this work, two piezoelectric PZT (lead zirconate titanate) bimorph actuators, with different tip contact materials, were applied as tactile sensors to estimate the modulus of elasticity, or Young’s modulus, of low-stiffness materials. The actuators were chosen to work in resonance, taking advantage of a relatively low resonant frequency of the out-of-plane vibrational modes, associated with a convenient compliance, proven by optical and electrical characterization. Optical measurements performed with a scanning laser vibrometer confirmed that the displacement per applied voltage was around 437 nm/V for the resonator with the lower mass tip. In order to determine the modulus of elasticity of the sensed materials, the stiffness coefficient of the resonator was first calibrated against a force sensor, obtaining a value of 1565 ± 138 N/m. The actuators were mounted in a positioning stage to allow approximation and contact of the sensor tip with a set of target materials. Electrical measurements were performed using the resonator as part of an oscillator circuit, and the modulus of elasticity of the sample was derived from the contact resonant frequency curve of the cantilever–sample system. The resulting sensor is an effective, low-cost and non-destructive solution compared to atomic force microscopy (AFM) techniques. Materials with different modulus of elasticity were tested and the results compared to values reported in the literature.

ACS Style

Javier Toledo; Víctor Ruiz-Díez; Jorge Hernando-García; José Luis Sánchez-Rojas. Piezoelectric Actuators for Tactile and Elasticity Sensing. Actuators 2020, 9, 21 .

AMA Style

Javier Toledo, Víctor Ruiz-Díez, Jorge Hernando-García, José Luis Sánchez-Rojas. Piezoelectric Actuators for Tactile and Elasticity Sensing. Actuators. 2020; 9 (1):21.

Chicago/Turabian Style

Javier Toledo; Víctor Ruiz-Díez; Jorge Hernando-García; José Luis Sánchez-Rojas. 2020. "Piezoelectric Actuators for Tactile and Elasticity Sensing." Actuators 9, no. 1: 21.

Journal article
Published: 27 April 2019 in Micromachines
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A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 μm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid.

ACS Style

Alex Díaz-Molina; Víctor Ruiz-Díez; Jorge Hernando-García; Abdallah Ababneh; Helmut Seidel; José Luis Sánchez-Rojas. Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid. Micromachines 2019, 10, 283 .

AMA Style

Alex Díaz-Molina, Víctor Ruiz-Díez, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas. Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid. Micromachines. 2019; 10 (5):283.

Chicago/Turabian Style

Alex Díaz-Molina; Víctor Ruiz-Díez; Jorge Hernando-García; Abdallah Ababneh; Helmut Seidel; José Luis Sánchez-Rojas. 2019. "Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid." Micromachines 10, no. 5: 283.

Journal article
Published: 21 February 2019 in Micromachines
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In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift caused by particles collected on the resonator surface. To test the sensor sensitivity obtained from mass-loading effects, an Aluminum Nitride-based piezoelectric resonator was exposed to cigarette particles in a sealed chamber. In order to determine the resonance parameters of interest, an interface circuit was implemented and included within both open-loop and closed-loop schemes for comparison. The system was capable of tracking the resonance frequency with a mass sensitivity of 8.8 Hz/ng. Although the tests shown here were proven by collecting particles from a cigarette, the results obtained in this application may have interest and can be extended towards other applications, such as monitoring of nanoparticles in a workplace environment.

ACS Style

Javier Toledo; Víctor Ruiz-Díez; Maik Bertke; Hutomo Suryo Wasisto; Erwin Peiner; José Luis Sánchez-Rojas. Piezoelectric MEMS Resonators for Cigarette Particle Detection. Micromachines 2019, 10, 145 .

AMA Style

Javier Toledo, Víctor Ruiz-Díez, Maik Bertke, Hutomo Suryo Wasisto, Erwin Peiner, José Luis Sánchez-Rojas. Piezoelectric MEMS Resonators for Cigarette Particle Detection. Micromachines. 2019; 10 (2):145.

Chicago/Turabian Style

Javier Toledo; Víctor Ruiz-Díez; Maik Bertke; Hutomo Suryo Wasisto; Erwin Peiner; José Luis Sánchez-Rojas. 2019. "Piezoelectric MEMS Resonators for Cigarette Particle Detection." Micromachines 10, no. 2: 145.

Journal article
Published: 06 February 2019 in Sensors
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Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm3 cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10−6 g/mL and 10−4 mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.

ACS Style

Víctor Ruiz-Díez; Javier Toledo; Jorge Hernando-García; Abdallah Ababneh; Helmut Seidel; José Luis Sánchez-Rojas. A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors. Sensors 2019, 19, 658 .

AMA Style

Víctor Ruiz-Díez, Javier Toledo, Jorge Hernando-García, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas. A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors. Sensors. 2019; 19 (3):658.

Chicago/Turabian Style

Víctor Ruiz-Díez; Javier Toledo; Jorge Hernando-García; Abdallah Ababneh; Helmut Seidel; José Luis Sánchez-Rojas. 2019. "A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors." Sensors 19, no. 3: 658.

Journal article
Published: 01 March 2018 in Applied Mathematical Modelling
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ACS Style

David Ruiz; Alex Díaz-Molina; Ole Sigmund; Alberto Donoso; José Carlos Bellido; José Luis Sánchez-Rojas. Optimal design of robust piezoelectric unimorph microgrippers. Applied Mathematical Modelling 2018, 55, 1 -12.

AMA Style

David Ruiz, Alex Díaz-Molina, Ole Sigmund, Alberto Donoso, José Carlos Bellido, José Luis Sánchez-Rojas. Optimal design of robust piezoelectric unimorph microgrippers. Applied Mathematical Modelling. 2018; 55 ():1-12.

Chicago/Turabian Style

David Ruiz; Alex Díaz-Molina; Ole Sigmund; Alberto Donoso; José Carlos Bellido; José Luis Sánchez-Rojas. 2018. "Optimal design of robust piezoelectric unimorph microgrippers." Applied Mathematical Modelling 55, no. : 1-12.

Journal article
Published: 01 January 2018 in Sensors and Actuators B: Chemical
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ACS Style

Javier Toledo; Víctor Ruiz Díez; Georg Pfusterschmied; U. Schmid; José Luis Sanchez-Rojas. Flow-through sensor based on piezoelectric MEMS resonator for the in-line monitoring of wine fermentation. Sensors and Actuators B: Chemical 2018, 254, 291 -298.

AMA Style

Javier Toledo, Víctor Ruiz Díez, Georg Pfusterschmied, U. Schmid, José Luis Sanchez-Rojas. Flow-through sensor based on piezoelectric MEMS resonator for the in-line monitoring of wine fermentation. Sensors and Actuators B: Chemical. 2018; 254 ():291-298.

Chicago/Turabian Style

Javier Toledo; Víctor Ruiz Díez; Georg Pfusterschmied; U. Schmid; José Luis Sanchez-Rojas. 2018. "Flow-through sensor based on piezoelectric MEMS resonator for the in-line monitoring of wine fermentation." Sensors and Actuators B: Chemical 254, no. : 291-298.

Conference paper
Published: 23 November 2017 in Journal of Physics: Conference Series
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This work describes the performance in terms of displacement of two different in-plane piezoelectrically-actuated microactuators: a gripper and an extensional actuator. The materials and the corresponding thicknesses were varied in search of the best configuration for maximum displacement. Three different combinations of materials were considered: AlN/silicon, AlN/polyimide and PVDF/polyimide. A static finite element analysis allowed the calculation of the in-plane displacement. Reduction in the displacement per volt was observed when the thickness of the structure was increased. Despite the fact that polymeric materials are significantly less stiff than silicon, having potential advantages, our simulations reveal that it does not translate into the corresponding improvement in displacement per volt.

ACS Style

Alex Díaz-Molina; Jorge Hernando-Garcia; José Luis Sánchez-Rojas. Performance analysis of in-plane piezoelectric unimorph microactuators based on silicon and polymer substrates. Journal of Physics: Conference Series 2017, 922, 12021 .

AMA Style

Alex Díaz-Molina, Jorge Hernando-Garcia, José Luis Sánchez-Rojas. Performance analysis of in-plane piezoelectric unimorph microactuators based on silicon and polymer substrates. Journal of Physics: Conference Series. 2017; 922 ():12021.

Chicago/Turabian Style

Alex Díaz-Molina; Jorge Hernando-Garcia; José Luis Sánchez-Rojas. 2017. "Performance analysis of in-plane piezoelectric unimorph microactuators based on silicon and polymer substrates." Journal of Physics: Conference Series 922, no. : 12021.

Technical paper
Published: 30 August 2017 in Microsystem Technologies
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The main objective of this work is the assessment of a calibration method for piezoelectric MEMS resonators for simultaneous density and viscosity sensing. A device designed to resonate with the 2nd order out-of-plane modal vibration (13-mode) was immersed in several test liquids (i.e. D5, N10, N35, PAO8, olive oil, ester oil, DITA and N100). Two important parameters were estimated from the electrical impedance characterization: the quality factor and the resonant frequency. Once these two parameters are known, the viscosity and density of the liquids under test were determined following different calibration models. An advanced calibration model, based on a Taylor series of the hydrodynamic function, was established as a suitable method for determining the density and viscosity with the lowest calibration error. Our results demonstrate that the calibration coefficients, obtained in the calibration process, are valid in a temperature range between 20 and 40 °C in liquids with viscosities up to 300 mPa s. Furthermore, the estimated density and viscosity values with the MEMS resonator were compared to the values obtained with a commercial density–viscosity meter, reaching a mean calibration error in the best scenario of around 0.4% for the density and 2.8% for the viscosity.

ACS Style

J. Toledo; Víctor Ruiz Díez; Georg Pfusterschmied; U. Schmid; José Luis Sanchez-Rojas. Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids. Microsystem Technologies 2017, 24, 1423 -1431.

AMA Style

J. Toledo, Víctor Ruiz Díez, Georg Pfusterschmied, U. Schmid, José Luis Sanchez-Rojas. Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids. Microsystem Technologies. 2017; 24 (3):1423-1431.

Chicago/Turabian Style

J. Toledo; Víctor Ruiz Díez; Georg Pfusterschmied; U. Schmid; José Luis Sanchez-Rojas. 2017. "Calibration procedure for piezoelectric MEMS resonators to determine simultaneously density and viscosity of liquids." Microsystem Technologies 24, no. 3: 1423-1431.

Journal article
Published: 26 June 2017 in Micromachines
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In this study grape must fermentation is monitored using a self-actuating/self-sensing piezoelectric micro-electromechanical system (MEMS) resonator. The sensor element is excited in an advanced roof tile-shaped vibration mode, which ensures high Q-factors in liquids (i.e., Q ~100 in isopropanol), precise resonance frequency analysis, and a fast measurement procedure. Two sets of artificial model solutions are prepared, representing an ordinary and a stuck/sluggish wine fermentation process. The precision and reusability of the sensor are shown using repetitive measurements (10 times), resulting in standard deviations of the measured resonance frequencies of ~0.1%, Q-factor of ~11%, and an electrical conductance peak height of ~12%, respectively. With the applied evaluation procedure, moderate standard deviations of ~1.1% with respect to density values are achieved. Based on these results, the presented sensor concept is capable to distinguish between ordinary and stuck wine fermentation, where the evolution of the wine density associated with the decrease in sugar and the increase in ethanol concentrations during fermentation processes causes a steady increase in the resonance frequency for an ordinary fermentation. Finally, the first test measurements in real grape must are presented, showing a similar trend in the resonance frequency compared to the results of an artificial solutions, thus proving that the presented sensor concept is a reliable and reusable platform for grape must fermentation monitoring.

ACS Style

Georg Pfusterschmied; Javier Toledo; Martin Kucera; Wolfgang Steindl; Stefan Zemann; Víctor Ruiz-Díez; Michael Schneider; Achim Bittner; Jose Luis Sanchez-Rojas; Ulrich Schmid. Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring. Micromachines 2017, 8, 200 .

AMA Style

Georg Pfusterschmied, Javier Toledo, Martin Kucera, Wolfgang Steindl, Stefan Zemann, Víctor Ruiz-Díez, Michael Schneider, Achim Bittner, Jose Luis Sanchez-Rojas, Ulrich Schmid. Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring. Micromachines. 2017; 8 (7):200.

Chicago/Turabian Style

Georg Pfusterschmied; Javier Toledo; Martin Kucera; Wolfgang Steindl; Stefan Zemann; Víctor Ruiz-Díez; Michael Schneider; Achim Bittner; Jose Luis Sanchez-Rojas; Ulrich Schmid. 2017. "Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring." Micromachines 8, no. 7: 200.

Proceedings article
Published: 05 June 2017 in Smart Sensors, Actuators, and MEMS VIII
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In this paper, the fluid-structure interaction in cantilever-type devices vibrating in the first and higher roof tile-shaped modes is studied. These modes can be most efficiently excited by a thin piezoelectric film on top of the structure in combination with a tailored electrode design. The electrical and optical characterization of the different devices and modes is carried out in liquid media and then the performance of the resonators is evaluated in terms of quality factor and resonant frequency. The effect of the fluid on the in-liquid response is studied using analytical and finite element method models. For the latter, a fully coupled fluid-structure interaction model is developed and compared to a simpler model, in which no coupling feedback from the fluid to the structure is taken into account. The results show that, despite the substantially larger computational effort, the consideration of the fluid-structure coupling is absolutely necessary to explain the experimental results for higher order modes.

ACS Style

V. Ruiz-Díez; Javier Toledo; J. Hernando-García; G. Pfusterschmied; U. Schmid; J. L. Sánchez-Rojas. Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators. Smart Sensors, Actuators, and MEMS VIII 2017, 10246, 1024604 .

AMA Style

V. Ruiz-Díez, Javier Toledo, J. Hernando-García, G. Pfusterschmied, U. Schmid, J. L. Sánchez-Rojas. Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators. Smart Sensors, Actuators, and MEMS VIII. 2017; 10246 ():1024604.

Chicago/Turabian Style

V. Ruiz-Díez; Javier Toledo; J. Hernando-García; G. Pfusterschmied; U. Schmid; J. L. Sánchez-Rojas. 2017. "Fluid-structure interaction modelling of the roof tile-shaped modes in piezoelectric plate microresonators." Smart Sensors, Actuators, and MEMS VIII 10246, no. : 1024604.

Journal article
Published: 03 June 2017 in Actuators
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In this paper, two different piezoelectric microactuator designs are studied. The corresponding devices were designed for optimal in-plane displacements and different high flexibilities, proven by electrical and optical characterization. Both actuators presented two dominant vibrational modes in the frequency range below 1 MHz: an out-of-plane bending and an in-plane extensional mode. Nevertheless, the latter mode is the only one that allows the use of the device as a modal in-plane actuator. Finite Element Method (FEM) simulations confirmed that the displacement per applied voltage was superior for the low-stiffness actuator, which was also verified through optical measurements in a quasi-static analysis, obtaining a displacement per volt of 0.22 and 0.13 nm/V for the low-stiffness and high-stiffness actuator, respectively. In addition, electrical measurements were performed using an impedance analyzer which, in combination with the optical characterization in resonance, allowed the determination of the electromechanical and stiffness coefficients. The low-stiffness actuator exhibited a stiffness coefficient of 5 × 104 N/m, thus being more suitable as a modal actuator than the high-stiffness actuator with a stiffness of 2.5 × 105 N/m.

ACS Style

Javier Toledo; Victor Ruiz-Díez; Alex Diaz-Molina; David Ruiz; Alberto Donoso; José Carlos Bellido; Elisabeth Wistrela; Martin Kucera; Ulrich Schmid; Jorge Hernando-García; José Luis Sánchez-Rojas; Alex Díaz. Design and Characterization of In-Plane Piezoelectric Microactuators. Actuators 2017, 6, 19 .

AMA Style

Javier Toledo, Victor Ruiz-Díez, Alex Diaz-Molina, David Ruiz, Alberto Donoso, José Carlos Bellido, Elisabeth Wistrela, Martin Kucera, Ulrich Schmid, Jorge Hernando-García, José Luis Sánchez-Rojas, Alex Díaz. Design and Characterization of In-Plane Piezoelectric Microactuators. Actuators. 2017; 6 (2):19.

Chicago/Turabian Style

Javier Toledo; Victor Ruiz-Díez; Alex Diaz-Molina; David Ruiz; Alberto Donoso; José Carlos Bellido; Elisabeth Wistrela; Martin Kucera; Ulrich Schmid; Jorge Hernando-García; José Luis Sánchez-Rojas; Alex Díaz. 2017. "Design and Characterization of In-Plane Piezoelectric Microactuators." Actuators 6, no. 2: 19.

Proceedings article
Published: 02 June 2017 in Smart Sensors, Actuators, and MEMS VIII
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In this work, an aluminium nitride based piezoelectric resonator (05-mode) was fabricated and characterized to study how various factors, such as pressure, gas composition, the resonator geometry or the order of the vibrational mode, influence the resonant frequency and quality factor of micro resonators. In order to determine the resonant parameters of interest, an interface circuit was implemented and included within a closed-loop scheme. The effect of viscosity and density of the gases under test on the resonant parameters can be determined through a calibration process using different gases, an impedance analyser and theoretical values of density and viscosity reported in the literature. Depending on gas species different gas damping effects in the molecular, transitional and viscous flow regimes were observed. However, as the resonant mode number increases and therefore the resonant frequency, the acoustic wavelength reduces, the contribution of acoustic effects on the energy loss cannot be neglected any more in comparison with viscous effects. Our results demonstrate the performance of the resonator in different gases (Air, N2, Ar, CO2 and He) and pressures (0.1-950 mbar) by developing and applying specific experimental setup.

ACS Style

Javier Toledo; V. Ruiz-Díez; P. Schwarz; H. Seidel; J. L. Sánchez-Rojas. Oscillator circuit for monitoring the gas damping effect of piezoelectric microresonators. Smart Sensors, Actuators, and MEMS VIII 2017, 10246, 102460M .

AMA Style

Javier Toledo, V. Ruiz-Díez, P. Schwarz, H. Seidel, J. L. Sánchez-Rojas. Oscillator circuit for monitoring the gas damping effect of piezoelectric microresonators. Smart Sensors, Actuators, and MEMS VIII. 2017; 10246 ():102460M.

Chicago/Turabian Style

Javier Toledo; V. Ruiz-Díez; P. Schwarz; H. Seidel; J. L. Sánchez-Rojas. 2017. "Oscillator circuit for monitoring the gas damping effect of piezoelectric microresonators." Smart Sensors, Actuators, and MEMS VIII 10246, no. : 102460M.

Proceedings article
Published: 02 June 2017 in Smart Sensors, Actuators, and MEMS VIII
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Real-time monitoring of the physical properties of liquids, such as lubricants, is a very important issue for the automotive industry. For example, contamination of lubricating oil by diesel soot has a significant impact on engine wear. Resonant microstructures are regarded as a precise and compact solution for tracking the viscosity and density of lubricant oils. In this work, we report a piezoelectric resonator, designed to resonate with the 4th order out-of-plane modal vibration, 15-mode, and the interface circuit and calibration process for the monitoring of oil dilution with diesel fuel. In order to determine the resonance parameters of interest, i.e. resonant frequency and quality factor, an interface circuit was implemented and included within a closed-loop scheme. Two types of oscillator circuits were tested, a Phase-Locked Loop based on instrumentation, and a more compact version based on discrete electronics, showing similar resolution. Another objective of this work is the assessment of a calibration method for piezoelectric MEMS resonators in simultaneous density and viscosity sensing. An advanced calibration model, based on a Taylor series of the hydrodynamic function, was established as a suitable method for determining the density and viscosity with the lowest calibration error. Our results demonstrate the performance of the resonator in different oil samples with viscosities up to 90 mPa•s. At the highest value, the quality factor measured at 25°C was around 22. The best resolution obtained was 2.4•10-6 g/ml for the density and 2.7•10-3 mPa•s for the viscosity, in pure lubricant oil SAE 0W30 at 90°C. Furthermore, the estimated density and viscosity values with the MEMS resonator were compared to those obtained with a commercial density-viscosity meter, reaching a mean calibration error in the best scenario of around 0.08% for the density and 3.8% for the viscosity. © (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.

ACS Style

Javier Toledo; V. Ruiz-Díez; G. Pfusterschmied; U. Schmid; J. L. Sánchez-Rojas. Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators. Smart Sensors, Actuators, and MEMS VIII 2017, 10246, 102461 .

AMA Style

Javier Toledo, V. Ruiz-Díez, G. Pfusterschmied, U. Schmid, J. L. Sánchez-Rojas. Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators. Smart Sensors, Actuators, and MEMS VIII. 2017; 10246 ():102461.

Chicago/Turabian Style

Javier Toledo; V. Ruiz-Díez; G. Pfusterschmied; U. Schmid; J. L. Sánchez-Rojas. 2017. "Characterization of oscillator circuits for monitoring the density-viscosity of liquids by means of piezoelectric MEMS microresonators." Smart Sensors, Actuators, and MEMS VIII 10246, no. : 102461.