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<mml:math display="inline"><mml:mn>850</mml:mn><mml:mo>°</mml:mo><mml:mo>C</mml:mo></mml:math>850°C during 1 h show the crystalline β-phase of <mml:math display="inline"><mml:msub><mml:mi mathvariant="normal">Ga</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub><mml:msub><mml:mo>O</mml:mo><mml:mrow><mml:mn>3</mml:mn></mml:mrow></mml:msub><mml:mo>.</mml:mo></mml:math>Ga2O3. Rutherford backscattering results indicate that both as-deposited and annealed films have the stoichiometric chemical composition without incorporation of carbon impurities. Infrared (IR) spectroscopic measurements show that there is no incorporation of O-H and Ga-OH radicals in any of the studied films. The IR spectra for amorphous films show a broad absorption band from 400 to <mml:math display="inline"><mml:mn>900</mml:mn><mml:mo> </mml:mo><mml:msup><mml:mi mathvariant="normal">cm</mml:mi><mml:mrow><mml:mo>−</mml:mo><mml:mn>1</mml:mn></mml:mrow></mml:msup><mml:mo>,</mml:mo></mml:math>900 cm−1, typical for some amorphous metallic oxides. Meanwhile, for the annealed films the IR spectra show well-defined peaks located at 450 and <mml:math display="inline"><mml:mn>670</mml:mn><mml:mo> </mml:mo><mml:msup><mml:mi mathvariant="normal">cm</mml:mi><mml:mrow><mml:mo>−</mml:mo><mml:mn>1</mml:mn></mml:mrow></mml:msup></mml:math>670 cm−1 related to the β-phase of <mml:math display="inline"><mml:msub><mml:mi mathvariant="normal">Ga</mml:mi><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msub><mml:msub><mml:mo>O</mml:mo><mml:mrow><mml:mn>3</mml:mn></mml:mrow></mml:msub><mml:mo>.</mml:mo></mml:math>Ga2O3. The refractive index of the films shows a strong change from 1.846 for the amorphous films to 1.935 for the annealed ones. The optical bandgap energy values are 4.94 eV for the as-deposited films and 4.99 eV for the annealed films. All these changes are associated with a different microstructure of the annealed films. © 2001 The Electrochemical Society. All rights reserved.No biography provided yet