A S M Zadid Shifat

Mr. A S M Zadid Shifat

Optical Science Engineering, University of New Mexico, Albuquerque, New Mexico, USA
orcid

Research Focus & Metrics

Academic Career Length

9Years (2018-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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1 June 2018 in Results in Physics
Verified
Journal Article
Open access
ICInjamam Ul Islam Chowdhury
Injamam Ul Islam Chowdhury
JSJith Sarker
Jith Sarker
ASA S M Zadid Shifat
A S M Zadid Shifat
RSRezoan A. Shuvro
Rezoan A. Shuvro
Abu Farzan MitulAbu Farzan Mitul
Abu Farzan Mitul

9 January 2023 in Nanomaterials
Verified
Journal Article
Open access
PDF file
ASA S M Zadid Shifat
A S M Zadid Shifat
ISIsaac Stricklin
Isaac Stricklin
RCRavi kiran chityala
Ravi kiran chityala
AAArjun Aryal
Arjun Aryal
GEGiovanni Esteves
Giovanni Esteves
TBTito Busani
Tito Busani
A wide bandgap, an enhanced piezoelectric coefficient, and low dielectric permittivity are some of the outstanding properties that have made ScxAl1−xN a promising material in numerous MEMS and optoelectronics applications. One of the substantial challenges of fabricating ScxAl1−xN devices is its difficulty in etching, specifically with higher scandium concentration. In this work, we have developed an experimental approach with high temperature annealing followed by a wet etching process using tetramethyl ammonium hydroxide (TMAH), which maintains etching uniformity across various Sc compositions. The experimental results of etching approximately 730 nm of ScxAl1−xN (x = 0.125, 0.20, 0.40) thin films show that the etch rate decreases with increasing scandium content. Nevertheless, sidewall verticality of 85°~90° (±0.2°) was maintained for all Sc compositions. Based on these experimental outcomes, it is anticipated that this etching procedure will be advantageous in the fabrication of acoustic, photonic, and piezoelectric devices.

17 April 2024 in ACS Applied Electronic Materials
Verified
Journal Article
Closed access
ASA S M Zadid Shifat
A S M Zadid Shifat
RJRahul Jaiswal
Rahul Jaiswal
RCRavi Kiran Chityala
Ravi Kiran Chityala
ASAleem Siddiqui
Aleem Siddiqui
MMManel Martinez-Ramon
Manel Martinez-Ramon
TBTito Busani
Tito Busani