Frequency modulated continuous wave laser ranging (FMCW LiDAR) enables distance mapping with simultaneous position and velocity information, is immune to stray light, can achieve long range, operate in the eye-safe region of 1550 nm and achieve high sensitivity. Despite its advantages, it is compounded by the simultaneous requirement of both narrow linewidth low noise lasers that can be precisely chirped. While integrated silicon-based lasers, compatible with wafer scale manufacturing in large volumes at low cost, have experienced major advances and are now employed on a commercial scale in data centers, and impressive progress has led to integrated lasers with (ultra) narrow sub-100 Hz-level intrinsic linewidth based on optical feedback from photonic circuits, these lasers presently lack fast nonthermal tuning, i.e. frequency agility as required for coherent ranging. Here, we demonstrate a hybrid photonic integrated laser that exhibits very narrow intrinsic linewidth of 25 Hz while offering linear, hysteresis-free, and mode-hop-free-tuning beyond 1 GHz with up to megahertz actuation bandwidth constituting 1.6 × 10¹⁵Hz/s tuning speed. Our approach uses foundry-based technologies - ultralow-loss (1 dB/m) Si₃N₄photonic microresonators, combined with aluminium nitride (AlN) or lead zirconium titanate (PZT) microelectromechanical systems (MEMS) based stress-optic actuation. Electrically driven low-phase-noise lasing is attained by self-injection locking of an Indium Phosphide (InP) laser chip and only limited by fundamental thermo-refractive noise at mid-range offsets. By utilizing difference-drive and apodization of the photonic chip to suppress mechanical vibrations of the chip, a flat actuation response up to 10 MHz is achieved. We leverage this capability to demonstrate a compact coherent LiDAR engine that can generate up to 800 kHz FMCW triangular optical chirp signals, requiring neither any active linearization nor predistortion compensation, and perform a 10 m optical ranging experiment, with a resolution of 12.5 cm. Our results constitute a photonic integrated laser system for scenarios where high compactness, fast frequency actuation, and high spectral purity are required.

Integrated photonic devices based on Si₃N₄ waveguides allow for the exploitation of nonlinear frequency conversion, exhibit low propagation loss, and have led to advances in compact atomic clocks, ultrafast ranging, and spectroscopy. Yet, the lack of Pockels effect presents a major challenge to achieve high-speed modulation of Si₃N₄. Here, microwave-frequency acousto-optic modulation is realized by exciting high-overtone bulk acoustic wave resonances (HBAR) in the photonic stack. Although HBAR is ubiquitously used in modern communication and superconducting circuits, this is the first time it has been incorporated on a photonic integrated chip. The tight vertical acoustic confinement releases the lateral design of freedom, and enables negligible cross-talk and preserving low optical loss. This hybrid HBAR nanophotonic platform can find immediate applications in topological photonics with synthetic dimensions, compact opto-electronic oscillators, and microwave-to-optical converters. As an application, a Si₃N₄-based optical isolator is demonstrated by spatiotemporal modulation, with over 17 dB isolation achieved.

Recent decades have seen significant advancements in integrated photonics, driven by improvements in nanofabrication technology. This field has been developed from integrated semiconductor lasers and low-loss waveguides to optical modulators, enabling the creation of sophisticated optical systems on a chip-scale capable of performing complex functions such as optical sensing, signal processing, and metrology. The tight confinement of optical modes in photonic waveguides further enhances the optical nonlinearity, leading to a variety of nonlinear optical phenomena such as optical frequency combs, second-harmonic generation, and supercontinuum generation. Active tuning of photonic circuits not only is crucial for offsetting variations caused by fabrication in large-scale integration but also serves as a fundamental component in programmable photonic circuits. Piezoelectric actuation in photonic devices offers a low-power, high-speed solution and is essential in the design of future photonic circuits due to its compatibility with materials such as Si and Si₃N₄, which do not exhibit electro-optic effects. Here, we provide a detailed review of the latest developments in piezoelectric tuning and modulation by examining various piezoelectric materials, actuator designs tailored to specific applications, and the capabilities and limitations of current technologies. In addition, we explore the extensive applications enabled by piezoelectric actuators, including tunable lasers, frequency combs, quantum transducers, and optical isolators. These innovative ways of managing photon propagation and frequency on-chip are expected to be highly sought after in the future advancements of advanced photonic chips for both classical and quantum optical information processing and computing.

Recent advances in the development of ultra-low loss silicon nitride integrated photonic circuits have heralded a new generation of integrated lasers capable of reaching fiber laser coherence. However, these devices are presently based on self-injection locking of distributed feedback laser diodes, increasing both the cost and requiring tuning of laser setpoints for their operation. In contrast, turn-key legacy laser systems use reflective semiconductor optical amplifiers (RSOAs). While this scheme has been utilized for integrated photonics-based lasers, so far, no cost-effective RSOA-based integrated lasers exist that are low noise and simultaneously feature fast, mode-hop-free, and linear frequency tuning as required for frequency modulated continuous wave (FMCW) LiDAR or for laser locking in frequency metrology. Here we overcome this challenge and demonstrate a RSOA-based, frequency agile integrated laser, that can be tuned with high speed, with high linearity at low power. This is achieved using monolithic integration of piezoelectrical actuators on ultra-low loss silicon nitride photonic integrated circuits in a Vernier filter-based laser scheme. The laser operates at 1550 nm, features a 6 mW output power and a 400 Hz intrinsic laser linewidth, and allows ultrafast wavelength switching within 7 ns rise time and 75 nW power consumption. In addition, we demonstrate the suitability for FMCW LiDAR by showing laser frequency tuning over 1.5 GHz at 100 kHz triangular chirp rate with a nonlinearity of 0.25% after linearization and use the source for measuring a target scene 10 m away with a 8.5 cm distance resolution.