Coherent light detection and ranging (LiDAR), particularly the frequency-modulated continuous-wave LiDAR, is a robust optical imaging technology for measuring long-range distance and velocity in three dimensions (3D). We propose a spatio-spectral coherent LiDAR based on a unique wavelength-swept laser to enable both axial coherent ranging and lateral spatio-spectral beam scanning simultaneously. Instead of the conventional unidirectional wavelength-swept laser, a flutter-wavelength-swept laser (FWSL) successfully decoupled bidirectional wavelength modulation and continuous wavelength sweep, which overcame the measurable distance limited by the sampling process. The decoupled operation in FWSL enabled sequential sampling of flutter-wavelength modulation across its wide spectral bandwidth of 160 nm and, thus, allowed simultaneous distance and velocity measurement over an extended measurable distance. Herein, complete four-dimensional (4D) imaging, combining real-time 3D distance and velocity measurements, was implemented by solid-state beam scanning. An acousto-optic scanner was synchronized to facilitate the other lateral beam scanning, resulting in an optimized solid-state coherent LiDAR system. The proposed spatio-spectral coherent LiDAR system achieved high-resolution coherent ranging over long distances and real-time 4D imaging with a frame rate of 10 Hz, even in challenging environments.

Breath analysis has become increasingly important as a noninvasive process for the clinical diagnosis of patients suffering from various diseases. Many commercial gas preconcentration instruments are already being used to overcome the detection limits of commercial gas sensors for gas concentrations which are as low as ~100 ppb in exhaled breath. However, commercial instruments are large and expensive, and they require high power consumption and intensive maintenance. In the proposed study, a micro gas preconcentrator (μ-PC) filled with a carbon nanotube (CNT) foam as an adsorbing material was designed and fabricated for the detection of low-concentration ethane, which is known to be one of the most important biomarkers related to chronic obstructive pulmonary disease (COPD) and asthma. A comparison of the performance of two gas-adsorbing materials, i.e., the proposed CNT foam and commercial adsorbing material, was performed using the developed μ-PC. The experimental results showed that the synthesized CNT foam performs better than a commercial adsorbing material owing to its lower pressure drop and greater preconcentration efficiency in the μ-PC. The present results show that the application of CNT foam-embedded μ-PC in portable breath analysis systems holds great promise.

Gas chromatography (GC) is the chemical analysis technique most widely used to separate and identify gas components, and it has been extensively applied in various gas analysis fields such as non-invasive medical diagnoses, indoor air quality monitoring, and outdoor environmental monitoring. Micro-electro-mechanical systems (MEMS)-based GC columns are essential for miniaturizing an integrated gas analysis system (Micro GC system). This study reports an open-tubular-type micro GC (μ-GC) column with internal bump structures (bump structure μ-GC column) that substantially increase the interaction between the gas mixture and a stationary phase. The developed bump structure μ-GC column, which was fabricated on a 2 cm × 2 cm μ-GC chip and coated with a non-polar stationary phase, is 1.5 m-long, 150 μm-wide, and 400 μm-deep. It has an internal microfluidic channel in which the bumps, which are 150 μm diameter half-circles, are alternatingly disposed to face each other on the surface of the microchannel. The fabricated bump structure μ-GC column yielded a height-equivalent-to-a-theoretical-plate (HETP) of 0.009 cm (11,110 plates/m) at an optimal carrier gas velocity of 17 cm/s. The mechanically robust bump structure μ-GC column proposed in this study achieved higher separation efficiency than a commercially available GC column and a typical μ-GC column with internal post structures classified as a semi-packed-type column. The experimental results demonstrate that the developed bump structure μ-GC column can separate a gas mixture completely, with excellent separation resolution for formaldehyde, benzene, toluene, ethylbenzene, and xylene mixture, under programmed operating temperatures.

A unidirectional microelectromechanical system (MEMS) microphone single module for handsfree and voice recognition systems in automobiles is presented. Because in-cabin noise and temperature variation affect the reduction in the handsfree and voice recognition system performance, noise suppression and increasing the signal-to-noise ratio (SNR) of the microphone are required. In this study, a capacitive MEMS microphone module with a high SNR and a unidirectional characteristic is achieved by designing the structure, package, and module of the MEMS microphone. To improve the SNR, the microphone is developed using a slit-edged membrane. The slit structure is designed to release the residual stress of the membrane to achieve improved sensitivity and SNR. The unidirectional characteristic of the microphone enables suppression of noise signals from undesired directions. The directional characteristic of the microphone is realized by attaching a porous SU-8 filter to delay the time to one of the two acoustic ports on the package. Tests on the proposed unidirectional MEMS microphone package and module show that an SNR of 62.4 dB and a front-back ratio of 27.1 dB are achieved.