A microstructure determines macro functionality. A controlled periodic structure gives the surface specific functions such as controlled structural color, wettability, anti-icing/frosting, friction reduction, and hardness enhancement. Currently, there are a variety of controllable periodic structures that can be produced. Laser interference lithography (LIL) is a technique that allows for the simple, flexible, and rapid fabrication of high-resolution periodic structures over large areas without the use of masks. Different interference conditions can produce a wide range of light fields. When an LIL system is used to expose the substrate, a variety of periodic textured structures, such as periodic nanoparticles, dot arrays, hole arrays, and stripes, can be produced. The LIL technique can be used not only on flat substrates, but also on curved or partially curved substrates, taking advantage of the large depth of focus. This paper reviews the principles of LIL and discusses how the parameters, such as spatial angle, angle of incidence, wavelength, and polarization state, affect the interference light field. Applications of LIL for functional surface fabrication, such as anti-reflection, controlled structural color, surface-enhanced Raman scattering (SERS), friction reduction, superhydrophobicity, and biocellular modulation, are also presented. Finally, we present some of the challenges and problems in LIL and its applications.

Although nanopillars (NPs) provide a promising tool for capturing tumor cells, the effect of mixing NPs with other nanopatterns on cell behavior remains to be further studied. In this paper, a method of fabricating silicon nanoscale topographies by combining laser interference lithography with metal assisted chemical etching was introduced to investigate the behaviors and pseudopodia of A549 cells on the topologies. It was found that cells had a limited manner in spreading with small cell areas on the silicon nanopillar (SiNP) arrays, but a good manner in spreading with large cell areas on the silicon nanohole (SiNH) arrays. When on the hybrid SiNP/SiNH arrays, cells had medium cell areas and they arranged orderly along the boundaries of SiNPs and SiNHs, as well as 80% of cells displayed a preference for SiNPs over SiNHs. Furthermore, the lamellipodia and filopodia are dominant in the hybrid SiNP/SiNH and SiNP arrays, respectively, both of them are dominant in the SiNH arrays. In addition, the atomic force acoustic microscopy was also employed to detect the subsurface features of samples. The results suggest that the hybrid SiNP/SiNH arrays have a targeted trap and elongation effect on cells. The findings provide a promising method in designing hybrid nanostructures for efficient tumor cell traps, as well as regulating the cell behaviors and pseudopodia.