Lei Chen

Mr. Lei Chen


Research Focus & Metrics

Academic Career Length

9Years (2018-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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24 January 2018 in Micromachines
Verified
Journal Article
Open access
PDF file
JXJianbing Xie
Jianbing Xie
LCLei Chen
Lei Chen
HXHui Xie
Hui Xie
JZJinqiu Zhou
Jinqiu Zhou
GLGuangcheng Liu
Guangcheng Liu
Many researchers have studied the miniaturization of the hemisphere resonator gyroscope for decades. The hemisphere resonator (HSR), as the core component, has a size that has been reduced to the submillimeter level. We developed a method of batch production of micro-hemisphere shell resonators based on a glass-blowing process to obtain larger hemisphere shells with a higher ratio of height to diameter (H/D), we introduced the chemical foaming process (CFP) and acquired an optimized hemisphere shell; the contrasted and improved H/D of the hemisphere shell are 0.61 and 0.80, respectively. Finally, we increased the volume of glass shell resonator by 51.48 times while decreasing the four-node wineglass resonant frequencies from 7.24 MHz to 0.98 MHz. The larger HSR with greater surface area is helpful for setting larger surrounding drive and sense capacitive electrodes, thereby enhancing the sensitivity of HSR to the rotation. This CFP method not only provides more convenience to control the shape of a hemisphere shell but also reduces non-negligible cost in the fabrication process. In addition, this method may inspire some other research fields, e.g., microfluidics, chemical analysis, and wafer level package (WLP).