The use of magnetron sputtering film as a diffusion source was recently achieved in the industrial production of important grain-boundary-diffusion magnets. In this paper, the multicomponent diffusion source film is explored to optimize the microstructure of NdFeB magnets and improve their magnetic properties. Multicomponent Tb₆₀Pr₁₀Cu₁₀Al₁₀Zn₁₀ films of 10 μm in thickness and single Tb films of 10 μm in thickness were deposited on commercial NdFeB magnets’ surfaces by magnetron sputtering as diffusion sources for grain boundary diffusion. The effects of diffusion on the microstructure and magnetic properties of the magnets were investigated. The coercivity of multicomponent diffusion magnets and single Tb diffusion magnets increased from 11.54 kOe to 18.89 kOe and 17.80 kOe, respectively. The microstructure and element distribution of diffusion magnets were characterized by scanning electron microscope and transmission electron microscopy. The multicomponent diffusion facilitates the infiltration of Tb along grain boundaries, rather than entering the main phase, thereby improving the Tb diffusion utilization. Furthermore, compared to the Tb diffusion magnet, the thicker thin-grain boundary was observed in multicomponent diffusion magnets. This thicker thin-grain boundary can effectively serve as the impetus for the magnetic exchange/coupling between grains. Therefore, the multicomponent diffusion magnets have higher coercivity and remanence. The multicomponent diffusion source has an increased mixing entropy and decreased Gibbs free energy, and it therefore does not easily enter the main phase but is retained in the grain boundary, thus optimizing the microstructure of the diffusion magnet. Our results show that the multicomponent diffusion source is an effective route for fabricating diffusion magnets with high performance.

The decomposition of the Nd-Ce-Fe-B phase to form CeFe₂ has been usually believed to have an important positive effect on the magnetic properties of Nd-Ce-Fe-B permanent magnetic materials. In this work, a new decomposition process of the Nd-Ce-Fe-B phase on the formation of the CeFe₂ phase was observed to play a negative role in its magnetic properties. It is demonstrated that the Nd-Ce-Fe-B phase decomposes into non-magnetic CeFe₂, accompanied by the precipitation of Fe soft-phase. The kinks usually occurring in the demagnetization curves of Ce-rich Nd-Ce-Fe-B magnets have been determined to be related to the Fe soft-phase. Instead of using CeFe₂ as a grain-boundary phase, another Ce-Cu boundary phase has been explored to efficiently improve the coercivity of Ce-rich Nd-Ce-Fe-B magnets, provided that the Ce-Cu boundary phase has an appropriate Ce to Cu ratio. The present results contribute to the mechanism comprehension and high-performance design of Nd-Ce-Fe-B permanent magnetic materials.

Thick Nd-Fe-B permanent magnetic films with good perpendicular anisotropy have important applications in magnetic microelectromechanical systems (MEMSs). However, when the thickness of the Nd-Fe-B film reaches the micron level, the magnetic anisotropy and texture of NdFeB film will become worse, and it is also prone to peeling during heat treatment, which seriously limits their applications. In this paper, Si(100)/Ta(100 nm)/Nd_xFe_91−xB₉(x = 14.5, 16.4, 18.2)/Ta (100 nm) films with thicknesses of 2–10 μm are prepared by magnetron sputtering. It is found that gradient annealing (GN) could help improve the magnetic anisotropy and texture of the micron-thickness film. When the Nd-Fe-B film thickness increases from 2 μm to 9 μm, its magnetic anisotropy and texture do not deteriorate. For the 9 μm Nd-Fe-B film, a high coercivity of 20.26 kOe and high magnetic anisotropy (remanence ratio M_r/M_s = 0.91) are achieved. An in-depth analysis of the elemental composition of the film along the thickness direction is conducted, and the presence of Nd aggregation layers at the interface between the Nd-Fe-B and the Ta layers is confirmed. The influence of thicknesses of the Ta buffer layer on the peeling of Nd-Fe-B micron-thickness films after high-temperature annealing is investigated, and it is found that increasing the thickness of the Ta buffer layer could effectively inhibit the peeling of Nd-Fe-B films. Our finding provides an effective way to modify the heat treatment peeling of Nd-Fe-B films. Our results are important for the development of Nd-Fe-B micron-scale films with high perpendicular anisotropy for applications in magnetic MEMS.