We report on the integration of inkjet-printed graphene with a CMOS micro-electro-mechanical-system (MEMS) microhotplate for humidity sensing. The graphene ink is produced via ultrasonic assisted liquid phase exfoliation in isopropyl alcohol (IPA) using polyvinyl pyrrolidone (PVP) polymer as the stabilizer. We formulate inks with different graphene concentrations, which are then deposited through inkjet printing over predefined interdigitated gold electrodes on a CMOS microhotplate. The graphene flakes form a percolating network to render the resultant graphene-PVP thin film conductive, which varies in presence of humidity due to swelling of the hygroscopic PVP host. When the sensors are exposed to relative humidity ranging from 10–80%, we observe significant changes in resistance with increasing sensitivity from the amount of graphene in the inks. Our sensors show excellent repeatability and stability, over a period of several weeks. The location specific deposition of functional graphene ink onto a low cost CMOS platform has the potential for high volume, economic manufacturing and application as a new generation of miniature, low power humidity sensors for the internet of things.

In this paper we present a temperature-modulated graphene oxide (GO) resistive humidity sensor that employs complementary-metal-oxide-semiconductor (CMOS) micro-electro-mechanical-system (MEMS) micro-hotplate technology for the monitoring and control of indoor air quality (IAQ). GO powder is obtained by chemical exfoliation, dispersed in water and deposited via ink-jet printing onto a low power micro-hotplate. Atomic force microscopy (AFM) and transmission electron microscopy (TEM) show the typical layered and wrinkled morphology of the GO. Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and Fourier transform infra-red (FTIR) spectroscopy indicate that the GO flakes possess a significant number of oxygen containing functional groups (epoxy, carbonyl, hydroxyl) extremely attractive for humidity detection. Electro-thermal characterisation of the micro-hotplates shows a thermal efficiency of 0.11 mW per °C, resulting in a sensor DC power consumption of only 2.75 mW at 50 °C. When operated in an isothermal mode, the sensor response is detrimentally affected by significant drift, hysteretic behaviour, slow response/recovery times and hence poor RH level discrimination. Conversely, a temperature modulation technique coupled with a differential readout methodology results in a significant reduction of the sensor drift, improved linear response with a sensitivity of 0.14 mV per %, resolution below 5%, and a maximum hysteresis of ±5%; response and recovery times equal to 189 ± 49 s and 89 ± 5 s, respectively. These performance parameters satisfy current IAQ monitoring requirements. We have thus demonstrated the effectiveness of integrating GO on a micro-hotplate CMOS-compatible platform enabling temperature modulation schemes to be easily applied in order to achieve compact, low power, low cost humidity IAQ monitoring.

This paper addresses the practical implementation of a wireless sensors network designed to actualize cyber-physical systems that are dedicated to structural health monitoring applications in the construction domain. This network consists of a mesh grid composed of LoRaWAN battery-free wireless sensing nodes that collect physical data and communicating nodes that interface the sensing nodes with the digital world through the Internet. Two prototypes of sensing nodes were manufactured and are powered wirelessly by using a far-field wireless power transmission technique and only one dedicated RF energy source operating in the ISM 868 MHz frequency band. These sensing nodes can simultaneously perform temperature and relative humidity measurements and can transmit the measured data wirelessly over long-range distances by using the LoRa technology and the LoRaWAN protocol. Experimental results for a simplified network confirm that the periodicity of the measurements and data transmission of the sensing nodes can be controlled by the dedicated RF source (embedded in or just controlled by the associated communicating node), by tuning the radiated power density of the RF waves, and without any modification of the software or the hardware implemented in the sensing nodes.

In this paper, we present the design and characterization of a low-power low-cost infra-red emitter based on a tungsten micro-hotplate fabricated in a commercial 1-μm silicon on insulator-CMOS technology. The device has a 250-μm diameter resistive heater inside a 600-μm diameter thin dielectric membrane. We first present electro-thermal and optical device characterization, long term stability measurements, and then demonstrate its application as a gas sensor for a domestic boiler. The emitter has a dc power consumption of only 70 mW, a total emission of 0.8 mW across the 2.5-15-μm wavelength range, a 50% frequency modulation depth of 70 Hz, and excellent reproducibility from device-to-device. We also compare two larger emitters (heater size of 600 and 1800 μm) made in the same technology that have a much higher infra-red emission, but at the detriment of higher power consumption. Finally, we demonstrate that carbon nanotubes can be used to significantly enhance the thermo-optical transduction efficiency of the emitter.

This paper reports on the novel deposition of zinc oxide (ZnO) nanorods using a dip pen nanolithographic (DPN) technique on SOI (silicon on insulator) CMOS MEMS (micro electro mechanical system) micro-hotplates (MHP) and their characterisation as a low-cost, low-power ethanol sensor. The ZnO nanorods were synthesized hydrothermally and deposited on the MHP that comprise a tungsten micro-heater embedded in a dielectric membrane with gold interdigitated electrodes (IDEs) on top of an oxide passivation layer. The micro-heater and IDEs were used to heat up the sensing layer and measure its resistance, respectively. The sensor device is extremely power efficient because of the thin SOI membrane. The electro-thermal efficiency of the MHP was found to be 8.2 °C mW⁻¹, which results in only 42.7 mW power at an operating temperature of 350 °C. The CMOS MHP devices with ZnO nanorods were exposed to PPM levels of ethanol in humid air. The sensitivity achieved from the sensor was found to be 5.8% ppm⁻¹ to 0.39% ppm⁻¹ for the ethanol concentration range 25–1000 ppm. The ZnO nanorods showed an optimum response at 350 °C. The CMOS sensor was found to have a humidity dependence that needs consideration in real-world application. The sensors were also found to be selective towards ethanol when tested in the presence of toluene and acetone. We believe that the integration of ZnO nanorods using DPN lithography with a CMOS MEMS substrate offers a low cost, low power, smart ethanol sensor that could be exploited in consumer electronics.