Flow sensing in hostile environments is of increasing interest for applications in the automotive, aerospace, and chemical and resource industries. There are thermal and non-thermal approaches for high-temperature flow measurement. Compared to their non-thermal counterparts, thermal flow sensors have recently attracted a great deal of interest due to the ease of fabrication, lack of moving parts and higher sensitivity. In recent years, various thermal flow sensors have been developed to operate at temperatures above 500 °C. Microelectronic technologies such as silicon-on-insulator (SOI), and complementary metal-oxide semiconductor (CMOS) have been used to make thermal flow sensors. Thermal sensors with various heating and sensing materials such as metals, semiconductors, polymers and ceramics can be selected according to the targeted working temperature. The performance of these thermal flow sensors is evaluated based on parameters such as thermal response time, flow sensitivity. The data from thermal flow sensors reviewed in this paper indicate that the sensing principle is suitable for the operation under harsh environments. Finally, the paper discusses the packaging of the sensor, which is the most important aspect of any high-temperature sensing application. Other than the conventional wire-bonding, various novel packaging techniques have been developed for high-temperature application.

There is an increasing demand for measuring respiratory rate (RR) to monitor the progression of clinical events such as cardiac arrest or during the admission to the intensive care unit (ICU). Current methods of respiration monitoring are complex, invasive, expensive and therefore require alternative techniques. In this paper, we utilized wearable and flexible technology to develop humidity sensors for long-term continuous monitoring of respiration. Using manual drawing and printing techniques, the sensors were made based on graphite trace and silver nanoparticles as two different sensing materials. The surface morphologies of the devices were characterized by Scanning Electron Microscope (SEM) to show the construction of the sensors. Additionally, the material characterization was performed to obtain the Raman Spectra. Paper was chosen as a flexible substrate owing to its biodegradability, porosity, and disposability. The humidity sensing characteristics of the sensors indicated the best sensitivity of 0.0564% for Graphite on Paper (GOP) sensor. Furthermore, the hygroscopic nature of the paper enables converting the humidity changes during inhalation and exhalation into electrical signals. The electrical signals are transmitted via an interface to a computer using a simple data-logging set-up. A set of normal, deep and apnea breathing conditions could be easily differentiated from these signals along with information on respiration rate and pattern. The functionality of sensors was also tested after light and rigorous exercises. The proposed sensor combines the advantages of being low cost, non-invasive, highly sensitive, stable and holds tremendous potential for wearable/flexible healthcare technology.

Flow sensing in hostile environment is of increasing interest for applications in automotive, aerospace, and chemical and resource industries. Compared to their counterparts, thermal flow sensors are attractive candidates due to the ease of fabrication, lack of moving parts and higher sensitivity. Recently, a number of thermal flow sensor prototypes have been reported in the literature demonstrating the measurement of fluid flows under hostile conditions. This paper summarizes the concept of thermal flow sensing, operational modes and transduction mechanisms. Then, the choice of materials and their corresponding properties are presented in details. The paper also reports recent progress in the development of thermal flow sensors for harsh environment. In addition, the issues and considerations in packaging are reviewed. Finally, we conclude the review with the future prospects.

We report a novel packaging and experimental technique for characterizing thermal flow sensors at high temperatures. This paper first reports the fabrication of 3C-SiC (silicon carbide) on a glass substrate via anodic bonding, followed by the investigation of thermoresistive and Joule heating effects in the 3C-SiC nano-thin film heater. The high thermal coefficient of resistance of approximately −20 720 ppm/K at ambient temperature and −9287 ppm/K at 200 °C suggests the potential use of silicon carbide for thermal sensing applications in harsh environments. During the Joule heating test, a high-temperature epoxy and a brass metal sheet were utilized to establish the electric conduction between the metal electrodes and SiC heater inside a temperature oven. In addition, the metal wires from the sensor to the external circuitry were protected by a fiberglass insulating sheath to avoid short circuit. The Joule heating test ensured the stability of mechanical and Ohmic contacts at elevated temperatures. Using a hot-wire anemometer as a reference flow sensor, calibration tests were performed at 25 °C, 35 °C, and 45 °C. Then, the SiC hot-film sensor was characterized for a range of low air flow velocity, indicating a sensitivity of 5 mm−1 s. The air flow was established by driving a metal propeller connected to a DC motor and controlled by a microcontroller. The materials, metallization, and interconnects used in our flow sensor were robust and survived temperatures of around 200 °C.