Current demands for flexible, individual microstructures in high quality result in high requirements for micro tools. As the tool size defines the minimum structure size, ultra-small tools are needed. To achieve tool diameters of 50 µm and lower, we investigate the complete manufacturing chain of micro machining. From the development of the machine tools and components needed to produce and apply the micro tools, the micro tools themselves, as well as the micro machining processes. Machine tools are developed with the possibility of producing the micro geometry (cutting edge design) of micro tools as well as plating processes to produce super abrasive micro grinding tools. Applying these setups, we are able to produce ultra-small micro grinding and micro milling tools with typical diameters of 50 µm and down to 4 µm. However, the application of such tools is very challenging. The article presents possibilities and limitations in manufacturing the micro tools themselves as well as microstructures made with these tools. A special emphasis will be on the influence of the tool substrate in micro milling and grain sizes in micro grinding.

Microgrinding with micropencil grinding tools (MPGTs) is a flexible and economic process to machine microstructures in hard and brittle materials. In macrogrinding, cooling and lubrication are done with metal cutting fluids; their application and influence is well researched. Although it can be expected that metal cutting fluids also play a decisive role in microgrinding, systematic investigations can hardly be found. A metal cutting fluid capable of wetting the machining process, containing quantities as small as 0.02% of the water-soluble fluid sodium dodecyl sulfate was tested in microgrinding experiments with MPGTs (diameter ~50 µm; abrasive grit size 2–4 µm). The workpiece material was hardened 16MnCr5.

Due to the constant need for better functionalized surfaces or smaller, function integrated components, precise and efficient manufacturing processes have to be established. Micro milling with micro end mills is one of the most promising processes for this task as it combines a high geometric flexibility in a wide range of machinable materials with low set-up costs. A downside of this process is the wear of the micro end mills. Due to size effects and the relatively low cutting speed, the cutting edge is especially subjected to massive abrasive wear. One possibility to minimize this wear is coating of micro end mills. This research paper describes the performance of eight different hard coatings for micro end mills with a diameter <40 µm and discusses some properties for the best performing coating type. With this research, it is therefore possible to boost the possibilities of micro milling for the manufacture of next generation products.