A novel design of a highly sensitive wireless passive RF strain transducer is presented based on a patch antenna loaded with an open loop that is capable of sensing strain independently in two directions. An original idea of utilizing a cantilever at the gap of the open loop significantly improves the sensitivity of resonant frequency shifts. The frequency shifts in two distinct resonant modes are detected based on two dominant orthogonal modes of the patch resonators. In measurements, the prototypes achieved a sensitivity of 2.35% frequency shift per 1% strain, more than twice that of existing strain transducers of the same class. In simulations, the new design achieved a theoretical sensitivity up to four times as high as existing designs of RF passive wireless strain transducers. The ground plane allows for the sensitivity of the sensor to be independent from the applied surface. An implementation example of the passive remote sensing system based on the proposed strain transducer is also discussed as a proof-of-concept case. Based on calculations, the interrogation method in the example shows a radar cross section fluctuation of 3.8 dB corresponding to the strain induced at the sensor.

In this paper, we investigate the impact of environment gases and relative humidity on dielectric charging phenomenon in electrostatically actuated micro- and nano-electromechanical systems (MEMS and NEMS). The research is based on surface potential measurements using Kelvin probe force microscopy (KPFM). Plasma-enhanced chemical vapor deposition (PECVD) silicon nitride films were investigated in view of applications in electrostatic capacitive RF MEMS switches. Charges were injected through the atomic force microscope (AFM) tip, and the induced surface potential was measured using KPFM. Experiments have been performed in air and in nitrogen environments, both under different relative humidity levels ranging from 0.02% to 40%. The impact of oxygen gas and hydrocarbon contaminants has been studied for the first time by using different gas purifiers in both air and nitrogen lines. Voltage pulses with different bias amplitudes have been applied during the charge injection step under all investigated environmental conditions in order to investigate the effect of bias amplitude. The investigation reveals a deeper understanding of charging and discharging processes and could further lead to improved operating environment conditions in order to minimize the dielectric charging. Finally, the nanoscale KPFM results obtained in this study show a good correlation with the device level measurements for capacitive MEMS switches reported in the literature.

This paper presents a method for the remote interrogation of batteryless humidity sensors based on statistical estimations and 3-D beam scanning techniques. As a proof-of-concept demonstration, a Van-Atta reflectarray sensor is interrogated with a 24-GHz frequency-modulated continuous-wave transceiver at various reading ranges. The extension of the proposed approach to passive or moving sensors is reported, and the measurement results are discussed. The relative humidity (RH) is derived from the statistical analysis of multidimensional radar echoes, while method is proposed to detect the sensor among clutter without knowing its exact position. Moreover, it is demonstrated that the cross-polarization effect of the Van-Atta reflectarray combined with the 3-D beam scanning technique allows the indoor measurement of the RH up to 58 m.