Energy storage is one of the major challenges on the road to environmental protection. The most commonly used batteries at present and in the near future are Li-ion-based systems. Therefore, reliable characterization methods are essential for further improvement of the properties and understanding of aging mechanisms. The imaging capabilities of scanning electron microscopy provide insight into morpholgy, structure and qualitative material contrast down to the nanometer scale [ 1, 2]. Examination of the qualitative chemical composition can be obtained with several additional equipment and correlative methods like Raman, mass spectrometry and energy dispersive X-ray (EDS) analysis [ 3, 4]. EDS enables also quantitative analysis into the trace constituent range (0.01 ≤ C ≤ 0.1) [ 5], but consistently upcoming questions are: How reliable are EDS studies for real life application under not ideal conditions, what are the influences of etc. sample preparation, storage and spectrum processing. Therefore a systematic study was carried out on Li(NixMnyCoz)O2 cathode material. The first topic was the determination of the stoichiometric composition of Ni, Mn and Co, where Ni, Mn and Co share one position, consequently x+y+z = 1. Table 1 show the different settings: Without contact to air (glove box => shuttle => SEM vacuum, shuttle) or prepared in air (air). Top view on a piece of cathode foil (topographic surface) or cross section obtained with Ar-Ion milling or mechanical polishing (Sec, flat surface). Additionally coated with Au (4nm) or C (10nm). Spectrum processing performed standard-based or standard-less and is automatically normalized to 100%, neglecting the Li content (Normalized). All performed examinations deliver a stoichiometric relationship close to NMC (811), Figure 1. This proves the robustness of this analysis technique. Additionally results obtained with ICP-OES (Inductively Coupled Plasma - Optical Emission Spectrometry) dotted lines in Fig.1 agree nicely (Ni: 0,835; Co: 0,107; Mn: 0,058) with the EDS results. Nowadays metallic Li becomes detectable by the new generation of EDS spectrometer, but a persistent limitation for chemical quantification of Li-ion battery materials is that bonded Li cannot directly detected by EDS. We determine the Li amount as the missing element fraction of not normalized quantitative EDS analysis. Additionally we solely take those spectra for the quantification into account, where the oxygen weight percent of the EDS spectra is ±3% of the expected weight percent for oxygen in Li(Ni8Mn1Co1)O2 . We obtained mean values of the Li weight percent for the analytic conditions: shuttle: 6,0±0,5%; air: 6,1±0,8%; Au coated: 10,6±0,8%; C coated: 10,4±0,7%, Argon Ion milling: 6,4±0,6%. Point and area spectra were acquired for all settings, providing consistent results.The mechanical polishing preparation alone yields 5.6±0.3% for the point spectra and 14.2 ±1.9% for the area spectra for the Li determination. On the one hand, this is probably due to the loss of Li during sample preparation => higher Li values for the area spectra and on the other hand by contamination during the acquisition of the point spectra underestimation of the Li content. The results of the studies performed with the conditions shuttle, air and Ar-Ion milling agree nicely with the expectation of 6,4% for a 100% lithiated cathode material after the first cycle, where the gold, carbon coating lead to a significant overestimation of the Li content and the mechanical polished section cannot deliver reliable results [ 6] .