CoCrFeMnNiAl_x (x = 0, 0.07, 0.3, 0.6, 1.0, 1.3) high-entropy alloy films (HEAFs) were processed by co-sputtering of CoCrFeMnNi alloy and Al targets. The effects of Al content on the microstructures and mechanical properties of HEAFs were studied. The XRD results indicated that the crystalline structure changed from the single face-centered cubic (FCC) phase for x = 0 and 0.07 to duplex FCC + body-centered cubic (BCC) phases for x = 0.3 and 0.6, and eventually, to a single BCC phase for x = 1.0 and 1.3, which agreed with the corresponding selected-area electron diffraction patterns. Also, nanotwins were observed in the FCC phase. Mechanical properties of films were studied using nanoindentation and micropillar compression tests. The hardness increased from 5.71 GPa at x = 0 to 8.74 GPa at x = 1.3. The compressive yield strength increased from 1.59 GPa to 3.73 GPa; however, the fracture strain decreased from 20.91% (no fracture) to 13.78% with the increasing Al content. Both nanotwins and BCC phase contributed to the strengthening effects for CoCrFeMnNiAl_x HEAFs. Also, compared to the bulk CoCrFeMnNiAl_x counterpart, the film exhibited much higher hardness and strength because of the much smaller grain size and the presence of nanotwins.

In the present work, Nb_x-CoCrFeMnNi high entropy alloy films (HEAFs, 0 to 7.2 at.% Nb) were fabricated by radio frequency (RF) magnetron co-sputtering of CoCrFeMnNi alloy and Nb targets. The effects of Nb addition on the microstructures and mechanical properties of HEAFs were systematically investigated. For Nb-free film (0 at.% Nb), the face-centered cubic (FCC) peaks were identified in the X-ray diffraction (XRD) pattern. The addition of Nb resulted in a broadening of diffraction peaks, a decrease in peak intensity, and the vanishment of high-angle peaks. Transmission electron microscope (TEM) images indicated the formation of nanotwins at low Nb concentrations, and a transition from a single phase FCC solid solution to an amorphous phase was observed with the increasing Nb concentration. The films were strengthened with an increase in Nb concentration. Specifically, the hardness characterized by nanoindentation increased from 6.5 to 8.1 GPa. The compressive yield strength and fracture strength measured from micropillar compression tests were improved from 1.08 GPs and 2.56 GPa to 2.70 GPa and 5.76 GPa, respectively, whereas the fracture strain decreased from >29.4% (no fracture) to 15.8%. Additionally, shear banding was observed in the presence of amorphous phase.

Skin-inspired flexible tactile sensors, with interfacial microstructure, are developed on cellulose fiber substrates for subtle pressure applications. Our device is made of two cellulose fiber substrates with conductive microscale structures, which emulate the randomly distributed spinosum in between the dermis and epidermis layers of the human skin. The microstructures not only permit a higher stress concentration at the tips but also generate electrical contact points and change contact resistance between the top and bottom substrates when the pressure is applied. Meanwhile, cellulose fibers possessing viscoelastic and biocompatible properties are utilized as substrates to mimic the dermis and epidermis layers of the skin. The electrical contact resistances (ECR) are then measured to quantify the tactile information. The microstructures and the substrate properties are studied to enhance the sensors’ sensitivity. A very high sensitivity (14.4 kPa⁻¹) and fast recovery time (approx. 2.5 ms) are achieved in the subtle pressure range (approx. 0–0.05 kPa). The device can detect subtle pressures from the human body due to breathing patterns and voice activity showing its potential for healthcare. Further, the guitar strumming and chord progression of the players with different skill levels are assessed to monitor the muscle strain during guitar playing, showing its potential for posture feedback in playing guitar or another musical instrument.