A large-aperture silicon carbide (SiC) aspheric mirror has the advantages of being light weight and having a high specific stiffness, which is the key component of a space optical system. However, SiC has the characteristics of high hardness and multi-component, which makes it difficult to realize efficient, high-precision, and low-defect processing. To solve this problem, a novel process chain combining ultra-precision shaping based on parallel grinding, rapid polishing with central fluid supply, and magnetorheological finishing (MRF) is proposed in this paper. The key technologies include the passivation and life prediction of the wheel in SiC ultra-precision grinding (UPG), the generation and suppression mechanism of pit defects on the SiC surface, deterministic and ultra-smooth polishing by MRF, and compensation interference detection of the high-order aspheric surface by a computer-generated hologram (CGH). The verification experiment was conducted on a Ø460 mm SiC aspheric mirror, whose initial surface shape error was 4.15 μm in peak-to-valley (PV) and a root-mean-square roughness (Rq) of 44.56 nm. After conducting the proposed process chain, a surface error of RMS 7.42 nm and a Rq of 0.33 nm were successfully obtained. Moreover, the whole processing cycle is only about 216 h, which sheds light on the mass production of large-aperture silicon carbide aspheric mirrors.

The straightness error of guideways is one of the key indicators of an ultra-precision machine, which plays an important role in the machining accuracy of a workpiece. In order to measure the straightness error of a long-distance ultra-precision guideway accurately, a splicing measurement for the straightness error of a guideway using a high-precision flat mirror and displacement sensor was proposed in this paper, and the data splicing processing algorithm based on coordinate transformation was studied. Then, comparative experiments on a splicing measurement and direct measurement of the straightness error were carried out on a hydrostatic guideway grinder. The maximum difference between the two measurements was 0.3 μm, which was far less than the straightness error of 5.8 μm. The experiment demonstrated the correctness of the proposed splicing measurement method and data processing algorithm. To suppress the influence of the straightness error on machining accuracy, a straightness error compensation algorithm based on error rotation transformation and vertical axis position correction was proposed, and the grinding experiment of a plane optics with a size of 1400 mm × 500 mm was carried out. Without error compensation grinding, the flatness error of the element was 7.54 μm. After error compensation grinding, the flatness error was significantly reduced to 2.98 μm, which was less than the straightness errors of the guideways. These results demonstrated that the straightness error of the grinding machine had been well suppressed.

During the ultra-precision grinding process of fused silica optics, the micro-removal processes of brittle and hard fused silica material by diamond grits in different wheel wear states are inconsistent, which leads to the instability of the grinding quality of the components. First, the wear forms of diamond wheel in the process of grinding brittle and hard fused silica material were analysed. The main wear form of diamond grinding wheel was diamond abrasive wear. Then taking the cumulative removal volume of material as the evaluation parameter of wheel wear state, the evolution laws of surface roughness and sub-surface defects of components under different cumulative removal volume of material were studied. With the aggravation of grinding wheel wear, the surface roughness and depth of sub-surface defects layer decreased first, and then fluctuated and increased slowly. In the rapid wear stage, the falling diamond particles scratched deep grooves on the surface of components, and the roughness and sub-surface depth increased sharply. According to the results, it’s reliable to monitor the wheel wear state and predict the life of wheel.

The straightness error of guideway is one of the key indicators of ultra-precision machine, which plays an important role in the machining accuracy of work-piece. In order to measure straightness error of long distance ultra-precision guideway accurately, a splicing measurement for straightness error of guideway using high-precision flat mirror and displacement sensor was proposed in this paper, and the data splicing processing algorithm based on coordinate transformation was studied. Then comparative experiments on splicing measurement and direct measurement of straightness error were carried out on a hydrostatic guideway grinder. The maximum difference between the two measurements was about 0.3μm, which was far less than the straightness error of 5.8μm. The experiment demonstrated the correctness of the proposed splicing measurement method and data processing algorithm. To suppress the influence of straightness error on machining accuracy, a straightness error compensation algorithm based on error rotation transformation and vertical axis position correction was proposed, and the grinding experiment of a plane optics with size of 1400mm×500mm was carried out, whose flatness error after grinding was about 2.98μm. The straightness error of the grinding machine had been well suppressed.