Miniaturized spectrometers are being developed in the recent few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site and mobile spectroscopic analysis. Although some devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost still dont meet the requirements for the ubiquitous deployment of the spectrometer as a spectral sensor needed for the smart industry and IoT applications. In this work we report an integrated microelectromechanical system (MEMS)-based Fourier Transform Infrared (FT-IR) spectral sensor. A monolithic scanning Michelson interferometer MEMS chip and an extended InGaAs photodetector chip are integrated with a micro-optical system in a tiny package with a footprint of 18 mm, presenting the smallest reported FT-IR solution to date. A compact light source head is designed and implemented targeting diffuse-reflection applications. The reported sensors spectral resolution is about 66.6 cm-1 across the spectral range of 1350-2550 nm. The signal-to-noise ratio (SNR) achieved is 8000:1 at 2400 nm in 2 seconds, with an order of magnitude improvement with respect to previously reported fiber-coupled solution. The presented solution provides a low cost, low power, wide wavelength range NIR spectral sensor that can be manufactured with high volumes leveraging economies of scale.

Gas sensors that can measure multiple pollutants simultaneously are highly desirable for on-site air pollution monitoring at various scales, both indoor and outdoor. Herein, we introduce a low-cost multi-parameter gas analyzer capable of monitoring multiple gaseous pollutants simultaneously, thus allowing for true analytical measurement. It is a spectral sensor consisting of a Fourier-transform infrared (FTIR) gas analyzer based on a mid-infrared (MIR) spectrometer. The sensor is as small as 7 × 5 × 2.5 cm³. It was deployed in an open-path configuration within a district-scale climatic chamber (Sense City, Marne-la-Vallée, France) with a volume of 20 × 20 × 8 m³. The setup included a transmitter and a receiver separated by 38 m to enable representative measurements of the entire district domain. We used a car inside the climatic chamber, turning the engine on and off to create time sequences of a pollution source. The results showed that carbon dioxide (CO₂) and water vapor (H₂O) were accurately monitored using the spectral sensor, with agreement with the reference analyzers used to record the pollution levels near the car exhaust. Furthermore, the lower detection limits of CO, NO₂ and NO were assessed, demonstrating the capability of the sensor to detect these pollutants. Additionally, a preliminary evaluation of the potential of the spectral sensor to screen multiple volatile organic compounds (VOCs) was conducted at the laboratory scale. Overall, the results demonstrated the potential of the proposed multi-parameter spectral gas sensor in on-site gaseous pollution monitoring.