Optical interferometry has emerged as a cornerstone technology for high-precision length measurement, offering unparalleled accuracy in various scientific and industrial applications. This review provides a comprehensive overview of the latest advancements in optical interferometry, with a focus on grating and laser interferometries. For grating interferometry, systems configurations ranging from single-degree- to multi-degree-of-freedom are introduced. For laser interferometry, different measurement methods are presented and compared according to their respective characteristics, including homodyne, heterodyne, white light interferometry, etc. With the rise of the optical frequency comb, its unique spectral properties have greatly expanded the length measurement capabilities of laser interferometry, achieving an unprecedented leap in both measurement range and accuracy. With regard to discussion on enhancement of measurement precision, special attention is given to periodic nonlinear errors and phase demodulation methods. This review offers insights into current challenges and potential future directions for improving interferometric measurement systems, and also emphasizes the role of innovative technologies in advancing precision metrology technology.

Grating interferometers highly valued for high resolution, straightforward benchmark and insensitivity to environmental disturbances, have become one of the most mainstream methods for ultra-precision positioning. Traditional heterodyne grating interferometers which use a dual-frequency orthogonally polarized laser source suffer nanometer-level periodic nonlinear error due to frequency and polarization mixing, thus becoming incompetent to undertake sub-nanometer measurement. Based on the design of two separated laser beams with a small frequency difference for heterodyne beating, a wavelength-stabilized and quasi-common-path heterodyne grating interferometer is proposed. It incorporates a symmetrical oblique incidence structure where the residual dead path is calibrated and the laser source wavelength is stabilized to the rubidium atomic transition line, diminishing heterodyne phase errors resulted from the optical path difference. This approach not only significantly mitigates periodic nonlinear error to below 0.3 nm, but also enhances measurement resolution, repeatability and interference robustness. The proposed heterodyne grating interferometer is determined for ultra-precision positioning serving for precision machinery manufacturing and scanning beam interference lithography and so forth.

A hybrid strategy is proposed to meet the challenge of obtaining the profile of micro gear teeth with a small modulus. Firstly, the contact probe segmentally obtained the falling flank profiles with an auxiliary lifting mechanism to avoid interference when it climbs on the rising slope. Then, the noncontact chromatic confocal displacement sensor efficiently acquired the gear peak positions to carry out the two-point error separation with the gear peak positions from the probe measurement. Finally, actual experiments were carried out to obtain the profile of a harmonic drive flexspline. Compared with the commercial ultraprecise profiler, the proposed method provides measurement results with a deviation of less than 20 μm. In conclusion, the hybrid strategy is feasible and accurate for drawing the micro gear teeth profile without any collision between the measuring probes and the measured workpiece.