Microelectromechanical systems (MEMS)-based filter with microchannels enables the removal of various microorganisms, including viruses and bacteria, from fluids. Membranes with porous channels can be used as filtration interfaces in MEMS hemofilters or mini-dialyzers. The main problems associated with the filtration process are optimization of membrane geometry and fouling. A nanoporous aluminum oxide membrane was fabricated using an optimized two-step anodization process. Computational strength modeling and analysis of the membrane with specified parameters were performed using the ANSYS structural module. A fuzzy simulation was performed for the numerical analysis of flux through the membrane. The membrane was then incorporated with the prototype for successive filtration. The fluid flux and permeation analysis of the filtration process have been studied. Scanning electron microscope (SEM) micrographs of membranes have been obtained before and after the filtration cycles. The SEM results indicate membrane fouling after multiple cycles, and thus the flux is affected. This type of fabricated membrane and setup are suitable for the separation and purification of various fluids. However, after several filtration cycles, the membrane was degraded. It requires a prolonged chemical cleaning. High-density water has been used for filtration purposes, so this MEMS-based filter can also be used as a mini-dialyzer and hemofilter in various applications for filtration. Such a demonstration also opens up a new strategy for maximizing filtration efficiency and reducing energy costs for the filtration process by using a layered membrane setup.

Microfluidic devices have gained subsequent attention due to their controlled manipulation of fluid for various biomedical applications. These devices can be used to study the behavior of fluid under several micrometer ranges within the channel. The major applications are the filtration of fluid, blood filtration and bio-medical analysis. For the filtration of water, as well as other liquids, the micro-filtration based microfluidic devices are considered as potential candidates to fulfill the desired conditions and requirements. The micro pore membrane can be designed and fabricated in such a way that it maximizes the removal of impurities from fluid. The low-cost micro-filtration method has been reported to provide clean fluid for biomedical applications and other purposes. In the work, anodic-aluminum-oxide-based membranes have been fabricated with different pore sizes ranging from 70 to 500 nm. A soft computing technique like fuzzy logic has been used to estimate the filtration parameters. Then, the finite-element-based analysis system software has been used to study the fluid flow through the double membrane. Then, filtration is performed by using a dual membrane and the clogging of the membrane has been studied after different filtration cycles using characterization like a scanning electron microscope. The filtration has been done to purify the contaminated fluid which has impurities like bacteria and protozoans. The membranes have been tested after each cycle to verify the results. The decrease in permeance with respect to the increase in the velocity of the fluid and the permeate volume per unit clearly depicts the removal of containments from the fluid after four and eight cycles of filtration. The results clearly show that the filtration efficiency can be improved by increasing the number of cycles and adding a dual membrane in the micro-fluidic device. The results show the potential of dual anodic aluminum oxide membranes for the effective filtration of fluids for biomedical applications, thereby offering a promising solution to address current challenges.