Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry–Perot (FP) pressure sensors have attracted great interest. Here we review the basic principles of MEMS fiber-optic FP pressure sensors and then discuss the sensors based on different materials and their industrial applications. We also introduce recent progress, such as two-photon polymerization-based 3D printing technology, and the state-of-the-art in this field, e.g., sapphire-based sensors that work up to 1200 °C. Finally, we discuss the limitations and opportunities for future development.
To develop implementation research on distributed optical fiber sensing technology, field tests were conducted on municipal roads and railways using a distributed acoustic sensor (DAS). Data were collected by the DAS during a field test for a long time period (more than 20 min), and we conducted short-term (<10 s) and long-term (≥10 s) analyses on these data separately. In the short-term data analysis, the vehicle type, vehicle length, and working status of the vehicle engine or the compressor were identified. In the long-term data analysis, the traffic flow was monitored, and the running distance, acceleration, speed, and braking distance of the vehicle were obtained. The characteristics of the vehicle operation data obtained in these field tests are important in developing the data processing method of DASs, which will help to promote the implementation of DASs.
A miniature and highly sensitive fiber-optic liquid flowmeter based on Fabry–Perot interferometry (FPI) is proposed and demonstrated for fluid-flow micro-channel testing. The diaphragm deformation and pressure of the proposed sensor for flow rate detection are obtained from numerical and finite element method simulations of the theoretical model. The FPI flowmeter can be applied in real time to measure the ultra-wide dynamic range from 0 mL/min to 90 mL/min, with a response time of hundreds of milliseconds, controlling the flow rate with a resolution of 1.08 mL/min, which is 1.2% of the full scale. The quadratic functional relation between dip wavelength shifts and flow rates is verified by the flow calibration curves of the FPI flowmeter under dynamic pressure conditions. In addition, the effective temperature compensation is realized by connecting an FBG temperature sensor for variable temperature flow detection, and the measured error is reduced by nearly 25-times. The proposed sensor has the potential to measure the liquid flow rate in various applications.