This article discusses the effective interaction potentials in a complex dusty plasma. The interaction of electrons with atoms and the interaction between dusty particles are studied by the method of the dielectric response function. In the effective interaction, potential between electron and atom the quantum effects of diffraction were taken into account. On the curve of the interaction potential between dust particles under certain conditions the oscillations can be observed.

The surface temperature of the dust particle in cryogenic complex plasmas at gas pressure 0.6–10 Pa is considered. It is shown that at low pressure the dust particle surface temperature is significantly higher than that of the background gas, as a result of which the atom drag force is comparable with the screened Coulomb interaction and even exceeds it for the large-size dust particles. As the gas temperature near the grain surface is a slowly decreasing function of distance with asymptotic ∼1/r behavior, for correct description of the cryogenic complex plasma at low gas pressure, it is important to include effects related to the dust particle surface temperature.

The feature of the promising tool of lithographic nanostructuring based on selective exposure of polymer resist by ion beam is very compact (of about tens of nanometers) beam interaction volume. Herewith the main part of beam energy is deposited in the resist and is spent to its modification. It causes the set of advantages specific for this method: sub-10 nanometer resolution achievable, very high energy efficiency and almost complete absence of proximity effect. But also due to this feature absorbed doze essentially inhomogeneous in resist and the dissolution rate is strongly dependent on depth. So the common procedure of resist contrast determination cannot be applied anymore. In the present work a new method for resist contrast determination considering the relation between dissolution rate and deposited energy density is suggested and realized. By using it for PMMA resist irradiated by 30 keV Ga⁺ ion beam the value of contrast was determined to be 3.1 and ions energy length was estimated to be 42 nm.