Antiperovskite Li3OCl superionic conductor films are prepared via pulsed laser deposition using a composite target. A significantly enhanced ionic conductivity of 2.0 × 10−4 S cm−1 at room temperature is achieved, and this value is more than two orders of magnitude higher than that of its bulk counterpart. The applicability of Li3OCl as a solid electrolyte for Li‐ion batteries is demonstrated.

Lithium-rich anti-perovskite Li₃OCl solid electrolyte films with significantly enhanced ionic conductivity were prepared by pulsed laser deposition.