Ion beam figuring (IBF) is an ultra-high-precision surface finishing technology characterized by a distinct trade-off between the spot size of the removal function and its corresponding figuring capabilities. A larger spot size for the removal function leads to higher processing efficiency but lower figuring ability. Conversely, a smaller spot size results in higher figuring ability but lower efficiency. Adjusting the spot size of the removal function using tools with an aperture is a possible approach. However, existing variable-aperture tools have certain limitations in IBF processing. To leverage the advantages of both large and small spot sizes for the removal function during IBF processing, an in situ dynamic beam variable-aperture device has been designed. This device optimizes the parameters of diaphragm sheets and employs FOC for dynamic aperture adjustment. Simulations show that 12 numbers of 0.1 mm-thick sheets minimize removal function distortion, with the thermal strain-induced area variation being 96.7%), operational parameter stability (relative change rate ≤5%), and high repeatable positioning precision (relative change rate ≤3.2% in repeated adjustments). The design enhances IBF efficiency, flexibility, and accuracy by enabling in situ spot size optimization, overcoming conventional limitations.

In order to expound the temperature characteristics of homogeneous material reflective system in principle, and provide the basis for the design of optical system, the temperature characteristics of single mirror, coaxial multi-mirror reflective system and off-axis reflective system were introduced successively, which were based on the thermal deformation characteristics and its calculation method, and the optical system focus was taken as the research object. Meanwhile, the corresponding thermal aberration model of reflective system was established. The simulation results show that the change of focal length with temperature in the off-axis three-mirror reflective system is completely consistent with the thermal deformation amount of corresponding lens barrel, and it has good imaging quality in the range of large temperature difference. The thermal defocus caused by the temperature change can be compensated by the lens barrel, which verifies the correctness of the theoretical model and draw a conclusion that there is no thermal aberration in the homogeneous material reflective system in the condition of uniform temperature field. Therefore, the optical system, especially the infrared system with obvious thermal aberration effect has good temperature adaptability when the homogeneous material reflective system is adopted.

Magnetorheological finishing is widely used in the high-precision processing of optical components, but due to the influence of multi-source system errors, the convergence of single-pass magnetorheological finishing (MRF) is limited. Although iterative processing can improve the surface accuracy, repeated tool paths tend to deteriorate mid-spatial frequency textures, and for complex surfaces such as aspheres, traditional manual alignment is time-consuming and lacks repeatability, significantly restricting the processing efficiency. To address these issues, firstly, this study systematically analyzes the effect of six-degree-of-freedom positioning errors on convergence behavior, establishes a positioning error-normal contour error transmission model, and obtains a workpiece positioning error tolerance threshold that ensures that the relative convergence ratio is not less than 80%. Further, based on these thresholds, a hybrid self-positioning method combining machine vision and a probing module is proposed. A composite data acquisition method using both a camera and probe is designed, and a stepwise global optimization model is constructed by integrating a synchronous iterative localization algorithm with the Non-dominated Sorting Genetic Algorithm II (NSGA-II). The experimental results show that, compared with the traditional alignment, the proposed method improves the convergence ratio of flat workpieces by 41.9% and reduces the alignment time by 66.7%. For the curved workpiece, the convergence ratio is improved by 25.7%, with an 80% reduction in the alignment time. The proposed method offers both theoretical and practical support for high-precision, high-efficiency MRF and intelligent optical manufacturing.

ZERODUR glass-ceramic is widely used in ultra-precision optical components because of its extremely low thermal expansion and excellent dimensional stability. However, its two-phase microstructure, composed of crystalline and amorphous phases with different mechanical properties, may cause non-uniform material removal during magnetorheological polishing, thereby limiting further improvement of nanoscale surface quality. To address this issue, this study investigates the effect of oxide abrasives on the surface homogenization of ZERODUR. A single-particle abrasive–workpiece contact model based on modified Hertz contact theory and elastoplastic contact analysis was established to compare the indentation responses of CeO₂, SiO₂, and ZrO₂ abrasives in the two constituent phases. Magnetorheological polishing experiments were conducted under identical process parameters, and the polished surfaces were characterized by AFM over scan areas of 2 μm × 2 μm, 5 μm × 5 μm, and 10 μm × 10 μm. The results show that all three abrasives improved the surface quality of the ring-polished substrate, with ZrO₂ achieving the best surface homogenization performance. The lowest roughness, Ra = 0.104 nm, was obtained at a 2 μm field of view, and the ZrO₂-polished surface showed more stable roughness evolution across different scan sizes than the CeO₂- and SiO₂-polished surfaces. These results indicate that the elastic modulus, hardness, and mechanical compatibility of abrasives with ZERODUR play key roles in governing contact stress, indentation behavior, and final surface quality. This work addresses the lack of mechanistic understanding of abrasive-dependent surface homogenization in the magnetorheological polishing of two-phase ZERODUR glass-ceramic. The main innovation is the integration of contact-mechanics-based abrasive–workpiece modeling with multi-scale AFM characterization to clarify how abrasive mechanical compatibility affects nanoscale surface uniformity and to guide abrasive selection for ultra-smooth optical manufacturing.