Highly integrated and stable devices are appealing in optical communication and sensing. This appeal arises from the presence of high refractive index contrast and high-quality waveguides. In this study, we improved the vapor proton exchange (VPE) process, enabling large-scale waveguide fabrication and addressing the issue of liquid exchange during cooling. Additionally, we have prepared and characterized planar waveguides on X-cut lithium niobate (LN) crystals. The exchanged samples exhibit α and k1 phases, refractive index contrasts as high as 0.082, and exceptional refractive index uniformity. Furthermore, we utilized the same process to fabricate channel waveguides and Y-branch waveguides. We achieved low propagation losses in channel waveguides, accompanied by small mode sizes, and low-loss Y-branch waveguides with a highly uniform beam splitting ratio. All waveguides exhibited consistent performance across multiple preparations and tests, remaining free from aging effects for three months. Our results underscore the promising potential of VPE for creating Y-branch splitters and modulators in LN crystals.