This paper presents a fast, highly sensitive and low-cost tapered optical fiber biosensor that enables the label-free detection of biomolecules. The sensor takes advantage of the interference effect between the fiber’s first two propagation modes along the taper waist region. The biomolecules bonded on the taper surface were determined by demodulating the transmission spectrum phase shift. Because of the sharp spectrum fringe signals, as well as a relatively long biomolecule testing region, the sensor displayed a fast response and was highly sensitive. To better understand the influence of various biomolecules on the sensor, a numerical simulation that varied biolayer parameters such as thickness and refractive index was performed. The results showed that the spectrum fringe shift was obvious to be measured even when the biolayer was only nanometers thick. A microchannel chip was designed and fabricated for the protection of the sensor and biotesting. Microelectromechanical systems (MEMS) fabrication techniques were used to precisely control the profile and depth of the microchannel on the silicon chip with an accuracy of 2 μm. A tapered optical fiber biosensor was fabricated and evaluated with an Immune globulin G (IgG) antibody-antigen pair.

A novel fabrication method for surface-enhanced Raman scattering (SERS) sensors that used a fast femtosecond (fs) laser scanning process to etch uniform patterns and structures on the endface of a fused silica optical fiber, which is then coated with a thin layer of silver through thermal evaporation is presented. A high quality SERS signal was detected on the patterned surface using a Rhodamine 6G (Rh6G) solution. The uniform SERS sensor built on the tip of the optical fiber tip was small, light weight, and could be especially useful in remote sensing applications.

A small, highly sensitive, and electromagnetic interference (EMI)-immune refractive index (RI) sensor based on the Fabry-Perot (FP) interferometer is presented. The sensor’s FP cavity was fabricated by aligning two metal-deposited, single-mode optical fiber endfaces inside a microchannel on a silicon chip. The mirrors on the fiber endfaces were made of thermal-deposited metal films, which provided the high finesse necessary to produce a highly sensitive sensor. Microelectromechanical systems (MEMS) fabrication techniques, specifically photolithography and deep dry etching, were used to precisely control the profile and depth of the microchannel on the silicon chip with an accuracy of 2 μm. The RI change within the FP cavity was determined by demodulating the transmission spectrum phase shift. The sensitivity and finesse of the transmission spectrum were controlled by adjusting the cavity length and the thickness of the deposited metal. Our experimental results showed that the sensor’s sensitivity was 665.90 nm/RIU (RI Unit), and the limit of detection was 6 × 10⁻⁶ RIU. Using MEMS fabrication techniques to fabricate these sensors could make high yield mass production a real possibility. Multiple sensors could be integrated on a single small silicon chip to simultaneously measure RI, temperature, and biomolecule targets.