Metalenses have shown a number of promising functionalities that are comparable with conventional refractive lenses. However, current metalenses are still far from commercialization due to the formidable fabrication costs. Here, we demonstrate a low-cost dielectric metalens that works in the visible spectrum. The material of the metalens consists of a matrix-inclusion composite in which a hierarchy satisfies two requirements for the single-step fabrication; a high refractive index and a pattern-transfer capability. We use a UV-curable resin as a matrix to enable direct pattern replication by the composite, and titanium dioxide nanoparticles as inclusions to increase the refractive index of the composite. Therefore, such a dielectric metalens can be fabricated with a single step of UV nanoimprint lithography. An experimental demonstration of the nanoparticle composite-based metalens validates the feasibility of our approach and capability for future applications. Our method allows rapid replication of metalenses repeatedly and thereby provides an advance toward the use of metalenses on a commercial scale.

As technology advances, electrical devices such as smartphones have become more and more compact, leading to a demand for the continuous miniaturization of optical components. Metalenses, ultrathin flat optical elements composed of metasurfaces consisting of arrays of subwavelength optical antennas, provide a method of meeting those requirements. Moreover, metalenses have many other distinctive advantages including aberration correction, active tunability, and semi-transparency, compared to their conventional refractive and diffractive counterparts. Therefore, over the last decade, great effort has been focused on developing metalenses to investigate and broaden the capabilities of metalenses for integration into future applications. Here, we discuss recent progress on metalenses including their basic design principles and notable characteristics such as aberration correction, tunability, and multifunctionality.

Nanofabrication techniques are essential for exploring nanoscience and many closely related research fields such as materials, electronics, optics and photonics. Recently, three-dimensional (3D) nanofabrication techniques have been actively investigated through many different ways, however, it is still challenging to make elaborate and complex 3D nanostructures that many researchers want to realize for further interesting physics studies and device applications. Electron beam lithography, one of the two-dimensional (2D) nanofabrication techniques, is also feasible to realize elaborate 3D nanostructures by stacking each 2D nanostructures. However, alignment errors among the individual 2D nanostructures have been difficult to control due to some practical issues. In this work, we introduce a straightforward approach to drastically increase the overlay accuracy of sub-20 nm based on carefully designed alignmarks and calibrators. Three different types of 3D nanostructures whose designs are motivated from metamaterials and plasmonic structures have been demonstrated to verify the feasibility of the method, and the desired result has been achieved. We believe our work can provide a useful approach for building more advanced and complex 3D nanostructures.

Metasurfaces are two-dimensional arrays of subwavelength optical antennas and have possible applications of next-generation optical components such as ultrathin lenses, high-resolution holograms, and optical cloaks. The remaining challenges in the field of metasurfaces involve the development of methods to manufacture those tiny nanostructures on a large scale. There have been many attempts to overcome the limitations of electron beam lithography which is a conventional method to fabricate metasurfaces. This review provides and discusses recent progress on metasurfaces with priority given to their applications and scalable manufacturing methods such as nanoimprint lithography, deep-UV lithography, colloidal lithography, and direct laser writing. These nanofabrication techniques will contribute to the commercialization of metasurfaces.