An automatic real-time focus inspection system based on a combination of dynamic focusing and real-time focus detection is introduced for use in high-precision laser processing. The system allows for accurately and rapidly positioning the laser focus on the target surface, wherever it is located along the optical axis. The proposed method is superior to conventional methods because it not only offers accurate, versatile, and high-speed autofocusing, but also combines well with the fabrication laser to perform laser processing when the laser focus is located on the sample. In this system, the laser focus is flexibly and automatically shifted along the optical axis by a dynamic focusing device to rapidly meet the working surface, ensuring high quality and complexity of fabricated patterns. Thus, the laser focus is not restricted to the focal point of the objective lens of infinity corrected microscopes reported previously. Furthermore, the focal spot analytically maintains its size with a size deviation less than 0.1% while the focus is slightly shifted along the optical axis, guaranteeing the size and quality of fabricated patterns. The proposed method is expected to lead to a high-precision laser fabrication system that can be widely applied in both science and the industry.

We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.

Here, we investigate a method to distinguish the counterfeits by patterning multiple reflective type grating directly on the surface of the original product and analyze the serial number from its rotation angles of diffracted fringes. The micro-sized gratings were fabricated on the surface of the material at high speeds by illuminating the interference fringe generated by passing a high-energy pulse laser through the Fresnel biprism. In addition, analysis of the grating’s diffraction fringes was performed using a continuous wave laser.

In modern high-intensity ultrafast laser processing, detecting the focal position of the working laser beam, at which the intensity is the highest and the beam diameter is the lowest, and immediately locating the target sample at that point are challenging tasks. A system that allows in-situ real-time focus determination and fabrication using a high-power laser has been in high demand among both engineers and scientists. Conventional techniques require the complicated mathematical theory of wave optics, employing interference as well as diffraction phenomena to detect the focal position; however, these methods are ineffective and expensive for industrial application. Moreover, these techniques could not perform detection and fabrication simultaneously. In this paper, we propose an optical design capable of detecting the focal point and fabricating complex patterns on a planar sample surface simultaneously. In-situ real-time focus detection is performed using a bandpass filter, which only allows for the detection of laser transmission. The technique enables rapid, non-destructive, and precise detection of the focal point. Furthermore, it is sufficiently simple for application in both science and industry for mass production, and it is expected to contribute to the next generation of laser equipment, which can be used to fabricate micro-patterns with high complexity.

Ditch-structured microporous layers were fabricated by nanosecond-pulse laser ablation for in-plane water transport improvement with various structural designs.

Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips.