Ronald Wing Fai Ip

Ronald Wing Fai Ip


Research Focus & Metrics

Academic Career Length

3Years (2024-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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27 January 2024 in Materials
Verified
Journal Article
Open access
PDF file
LCLi Chen
Li Chen
LCLiu Chen
Liu Chen
HLHock Koon Lee
Hock Koon Lee
BVBinni Varghese
Binni Varghese
RIRonald Wing Fai Ip
Ronald Wing Fai Ip
Yao ZhuYao Zhu
Yao Zhu
In this work, 10 nm scandium-doped aluminum nitride (AlScN) capacitors are demonstrated for the construction of the selector-free memory array application. The 10 nm Al0.7Sc0.3N film deposited on an 8-inch silicon wafer with sputtering technology exhibits a large remnant polarization exceeding 100 µC/cm2 and a tight distribution of the coercive field, which is characterized by the positive-up-negative-down (PUND) method. As a result, the devices with lateral dimension of only 1.5 μm show a large memory window of over 250% and a low power consumption of ~40 pJ while maintaining a low disturbance rate of <2%. Additionally, the devices demonstrate stable multistate memory characteristics with a dedicated operation scheme. The back-end-of-line (BEOL)-compatible fabrication process, along with all these device performances, shows the potential of AlScN-based capacitors for the implementation of the high-density selector-free memory array.