Elastic spherical polishing tools effectively conform to the polishing surface and exhibit high efficiency in the removal of materials, so they are extensively used in the sub-aperture polishing stages of optical components. However, their processing is often accompanied by significant mid-spatial frequency (MSF) errors, which critically degrade the performance of optical systems. To suppress the MSF errors generated during polishing with spherical tools, this study investigates the influence factor of MSF errors during the polishing process through an analysis of the convolution effect in material removal. A material removal profile model is established, and a uniform removal simulation is conducted to assess the influence of different shape material removal profiles on MSF errors. Simulation and experimental results show that a Gaussian-like shape material removal profile is more effective in suppressing the MSF errors during polishing compared to the “W” and trapezoidal shape material removal profiles. In addition, based on the characteristics of the RMS decreasing in a serrated trend with the decrease in path spacing, a path spacing optimization method considering the polishing efficiency is proposed to improve the polishing efficiency while controlling the MSF errors, and the effectiveness of the path spacing optimization method is verified by comparing the MSF error at the maximum theoretical path spacing and the path spacing that is less than this. Finally, the path spacing optimization method is used to polish single-crystal silicon to further illustrate its practicality.

Ultraprecision optical systems such as high-energy laser systems have very strict requirements for surface defects of optical components. Comet-shaped defects are common in magnetorheological finishing, which is one of the main ultraprecision manufacturing technologies. Computational fluid dynamics is used to simulate the pressure and velocity of the magnetorheological fluid in pits during magnetorheological finishing for the first time, to the best of our knowledge. The simulation model analyzes the distribution of velocity and pressure in the process of the formation of comet-shaped defects. After the simulation, magnetorheological polishing experiments were carried out on the fused quartz silica glass. The polishing experiments use the rotation speed and immersion depth of the polishing wheel to verify the velocity and pressure distribution in the simulation experiment. The polishing experiment results are consistent with the simulation results, which show that the high polishing speed will increase the depth of the defect, and the uneven velocity and pressure distribution at the pits make the pits evolve into comet-shaped defects. We explain the cause of comet-shaped defects from the perspective of material removal and provide an optimization method of process parameters for high-efficiency removal of comet-shaped defects.

In the field of ultra-precision manufacturing, such as lithography lenses, achieving nanometer-level errors across the entire frequency range is crucial. Magnetorheological finishing (MRF) technology, a high-precision processing method with high efficiency and low subsurface damage, often introduces mid-spatial frequency (MSF) error due to the removal attenuation effect and regular polishing trajectory in the long continuous polishing process. It causes various imaging and light transmission defects that limit the performance of precision optical instruments. The attenuation of material removal capacity of MRF is characterized by the attenuation of the tool influence function, which is obtained by an equal time interval point removal experiment. The variable optimal angle-step trajectory strategy is proposed to mitigate the removal attenuation effect of MRF and suppress MSF error. To validate the effectiveness and practicability of the proposed method, a uniform polishing experiment is performed on fused silica components. The experimental results show that the 90° grating trajectory introduces significant MSF error on surface shape with PV = 0.008 λ, and the variable optimal angle-step trajectory strategy does not introduce MSF error, which confirms the variable optimal angle-step trajectory strategy effectively eliminates the removal attenuation effect of MRF and suppresses MSF error. The study presents a general approach for ultra-precision optical processing and improves the manufacturing accuracy of optical components.

The surface of molybdenum disulfide (MoS₂) underwent oxygen plasma treatment to enhance its machinability and mitigate the tearing effects commonly associated with mechanical forces on 2D materials. This treatment led to the oxidation of the atoms on the top 1–3 layers of MoS₂, resulting in the formation of MoO₃ on the surface. During mechanical scanning probe lithography (m-SPL), only the surface oxide layer was uniformly removed, with material accumulation occurring predominantly on one side of the machined area. The resolution of the machining process was significantly enhanced via dynamic lithography while maintaining atomic-level smoothness in the machined area. Importantly, these techniques only removed the surface oxide layer, preserving the integrity of the underlying MoS₂ surface, which was pivotal in avoiding damage to the original material structure. This study provided valuable insights and practical guidance for the nanofabrication of transition metal dichalcogenides (TMDCs) nanodevices, demonstrating a method to finely tune the machining of these materials.

Cylindrical surfaces with complex parameters (CSCP), including off-axis, aspheric, and other properties, constitute fundamental components within complex optical systems. Two-dimensional pseudo lateral shearing interferometry (2DPLSI) is a non-null and generalized method for CSCP. It can eliminate wavefront error of components within systematic and retrace error, thereby achieving high-precision measurement. However, the accuracy of measurement is influenced by factors such as the parameters of the measurement system, rendering the analysis of measurement precision of 2DPLSI to be important. The sources of error in 2DPLSI are discussed in this paper; their effects are simulated using the Monte Carlo (MC) method. Furthermore, a wavefront construction method based on power spectral density (PSD) is proposed, which simulates actual wavefronts more effectively. In addition, experiments are conducted to validate the optimized measurement system parameters derived from the simulation results. Experimental results show that the optimized measurement system parameters effectively improve measurement accuracy, retain low-mid spatial frequency information of wavefront, and eliminate the influence of gridding artifacts.