The basal plane dislocation (BPD) density is one of the most important defects affecting the application of SiC wafers. In this study, numerical simulations and corresponding experiments were conducted to investigate the influence of cooling processes, seed-bonding methods, and graphite crucible materials on the BPD density in an 8-inch N-type 4H-SiC single crystal grown by the physical vapor transport (PVT) method. The results showed that the BPD density could be effectively reduced by increasing the cooling rate, optimizing the seed-bonding method, and adopting a graphite crucible with a similar coefficient of thermal expansion as the SiC single crystal. The BPD density in the experiments showed that a high cooling rate reduced the BPD density from 4689 cm−2 to 2925 cm−2; optimization of the seed-bonding method decreased the BPD density to 1560 cm−2. The BPD density was further reduced to 704 cm−2 through the adoption of a graphite crucible with a smaller thermal expansion coefficient.
Ultrawide bandgap (UWBG) AlN c- and m-face crystals have been prepared using the physical vapor transport (PVT) method and studied penetratively using temperature-dependent (TD) Raman scattering (RS) measurements under both visible (457 nm) and DUV (266 nm) excitations in 80–870 K, plus correlative atomic force microscopy (AFM) and variable-angle (VA) spectroscopic ellipsometry (SE). VASE identified their band gap energy as 6.2 eV, indicating excellent AlN characteristics and revealing Urbach energy levels of about 85 meV. Raman analyses revealed the residual tensile stress. TDRS shows that the E2(high) phonon lifetime decayed gradually in the 80–600 K range. Temperature has the greater influence on the stress of m-face grown AlN crystal. The influence of low temperature on the E2(high) phonon lifetime of m-plane AlN crystal is greater than that of the high-temperature region. By way of the LO-phonon and plasma coupling (LOPC), simulations of A1(LO) modes and carrier concentrations along different faces and depths in AlN crystals are determined. These unique and significant findings provide useful references for the AlN crystal growth and deepen our understanding on the UWBG AlN materials.
Directed epitaxial growth of oriented monolayer MoS2 films on c-plane sapphire substrates using pre-deposited highly oriented MoO2 nanorods as templates.