In this study, precise control over the thickness and termination of Ti3C2TX MXene flakes is achieved to enhance their electrical properties, environmental stability, and gas-sensing performance. Utilizing a hybrid method involving high-pressure processing, stirring, and immiscible solutions, sub-100 nm MXene flake thickness is achieved within the MXene film on the Si-wafer. Functionalization control is achieved by defunctionalizing MXene at 650 °C under vacuum and H2 gas in a CVD furnace, followed by refunctionalization with iodine and bromine vaporization from a bubbler attached to the CVD. Notably, the introduction of iodine, which has a larger atomic size, lower electronegativity, reduce shielding effect, and lower hydrophilicity (contact angle: 99°), profoundly affecting MXene. It improves the surface area (36.2 cm2 g−1), oxidation stability in aqueous/ambient environments (21 days/80 days), and film conductivity (749 S m−1). Additionally, it significantly enhances the gas-sensing performance, including the sensitivity (0.1119 Ω ppm−1), response (0.2% and 23% to 50 ppb and 200 ppm NO2), and response/recovery times (90/100 s). The reduced shielding effect of the –I-terminals and the metallic characteristics of MXene enhance the selectivity of I-MXene toward NO2. This approach paves the way for the development of stable and high-performance gas-sensing two-dimensional materials with promising prospects for future studies.
Suspended few-layer graphene beam electro-mechanical switches (SGSs) with 0.15 μm air-gap are fabricated and electrically characterized. The SGS shows an abrupt on/off current characteristics with minimal off current. In conjunction with the narrow air-gap, the outstanding mechanical properties of graphene enable the mechanical switch to operate at a very low pull-in voltage (VPI) of 1.85 V, which is compatible with conventional complimentary metal-oxide-semiconductor (CMOS) circuit requirements. In addition, we show that the pull-in voltage exhibits an inverse dependence on the beam length.