A novel decoupled XY compliant micro-positioning stage, based on a bridge-type amplification mechanism and parallelogram mechanisms, is designed in this paper. Analytical models of the bridge-type amplification mechanism and parallelogram mechanisms are developed by Castigliano’s second theorem and a Beam constrained model. The amplification ratio, input stiffness, and output stiffness of the stage are further derived, based on the proposed model. In order to verify the theoretical analysis, the finite element method (FEM) is used for simulation and modal analysis, and the simulation results indicate that the errors of the amplification ratio, input stiffness, and output stiffness of the stage between the proposed model and the FEM results are 2.34%, 3.87%, and 2.66%, respectively. Modal analysis results show that the fundamental natural frequency is 44 Hz, and the maximum error between the theoretical model and the FEM is less than 4%, which further validates the proposed modeling method. Finally, the prototype is fabricated to test the amplification ratio, cross-coupling error, and workspace. The experimental results demonstrate that the stage has a relatively large workspace, of 346.1 μm × 357.2 μm, with corresponding amplification ratios of 5.39 in the X-axis and 5.51 in the Y-axis, while the cross-coupling error is less than 1.5%.

Different to the traditionally defined valved piezoelectric (PZT) pump and valveless PZT pump, two groups of PZT pumps with built-in compliant structures—with distances between the free ends of 0.2 mm (Group A) and 0 mm (Group B)—were designed, fabricated, and experimentally tested. This type of pump mainly contains a chamber 12 mm in diameter and 1.1 mm in height, a PZT vibrator, and two pairs of compliant structures arranged on the flowing channel. The flow-resistance differences between these two groups of PZT pumps were theoretically and experimentally verified. The relationships between the amplitude, applied voltage and frequency of the PZT vibrators were obtained experimentally, with results illustrating that the amplitude linearly and positively correlates with the voltage, while nonlinearly and negatively correlating to the frequency. The flow rate performance of these two groups was experimentally tested from 110–160 Vpp and 10–130 Hz. Results showed that the flow rate positively correlates to the voltage, and the optimum flow rate frequency centers around 90 Hz for Group A and 80 Hz for Group B, respectively. The flow rate performances of Group B were further measured from 60–100 Hz and 170–210 Vpp, and obtained optimal flow rates of 3.6 mL/min at 210 Vpp and 80 Hz when ignoring the siphon-caused backward flow rate. As the compliant structures are not prominently limited by the channel’s size, and the pump can be minimized by Micro-electromechanical Systems (MEMS) processing methods, it is a suitable candidate for microfluidic applications like closed-loop cooling systems and drug delivery systems.

Among most traditional piezo water cooling systems, piezoelectric valve pumps are adopted as their driving sources. The valves in these pumps induce problems of shock and vibration and also make their structure complicated, which is uneasy to minimize and reduce their reliability and applicability of the whole system. In order to avoid these problems caused by valve structure, a novel valveless piezoelectric pump is developed, which integrates both functions of transforming and cooling. The pump’s Y-shape tree-like construction not only increases the efficiency of cooling but also the system reliability and applicability. Firstly, a multistage Y-shape treelike bifurcate tube is proposed, then a valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes is designed and its working principle is analyzed. Then, the theoretical analysis of flow resistance characteristics and the flow rate of the valveless piezoelectric pump are performed. Meanwhile, commercial software CFX is employed to perform the numerical simulation for the pump. Finally, this valveless piezoelectric pump is fabricated, the relationship between the flow rates and driving frequency, as well as the relationship between the back pressure and the driving frequency are experimentally investigated. The experimental results show that the maximum flow rate is 35.6 mL/min under 100 V peak-to-peak voltage (10.3 Hz) power supply, and the maximum back pressure is 55 mm H₂O under 100 V (9 Hz) power supply, which validates the feasibility of the valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes. The proposed research provides certain references for the design of valveless piezoelectric pump and improves the reliability of piezo water cooling systems.