S-parameters are widely used to detail the scattering parameters of radio frequency (RF) components and microwave circuit modules. The vector network analyzer (VNA) is the most commonly used device for measuring S-parameters. Given the multiple frequency points, complex values, and intricate uncertainty propagation involved, accurately assessing the uncertainty of S-parameter measurements is difficult. In this study, we proposed a new method for assessing S-parameter uncertainty based on the covariance matrices, tracing back to the nominal uncertainty of calibration standards. First, we analyzed the relevant theory of uncertainty assessment using covariance matrices and subsequently deduced the mechanism of Type B uncertainty propagating from calibration standards to error model coefficients and S-parameter measurements to evaluate Type B measurement uncertainty. In this study, a novel measurement system was constructed for measuring grounded coplanar waveguides by using a VNA and calibration standards with 8- and 12-error models. Initially, the model assessed the Type B uncertainty of measuring four S-parameters of a grounded coplanar waveguide. Next, the VNA calibrated with the 12-error model was used to conduct multiple repeated measurements to assess the Type A uncertainty of the grounded coplanar waveguide. Finally, the composite uncertainty was constructed, which demonstrated that the proposed method can be used for assessing the uncertainty of S-parameters.

This study proposes a method to quantify uncertainty in the scattering parameter (S-parameter) measurements when using de-embedding techniques. After calibrating the measurement setup with reference standards, de-embedding algorithms are employed to extract the intrinsic S-parameter of the device under test (DUT). This process introduces additional complexity to the uncertainty analysis. This study investigates the sources of uncertainty inherent to vector network analyzer (VNA) measurements. Subsequently, a covariance matrix-based approach is employed to propagate these uncertainties, culminating in the quantification of S-parameter uncertainty. The effectiveness of the proposed is determined by comparing the measured S-parameters of power dividers and couplers to their nominal values, considering parameters such as balance, coupling, and voltage standing wave ratio (VSWR). Additionally, an uncertainty analysis is conducted for the power divider’s S-parameters, tracing the uncertainty sources back to the calibration standards.