The unique characteristics of ultrafast lasers, such as picosecond and femtosecond lasers, have opened up new avenues in materials processing that employ ultrashort pulse widths and extremely high peak intensities. Thus, ultrafast lasers are currently used widely for both fundamental research and practical applications. This review describes the characteristics of ultrafast laser processing and the recent advancements and applications of both surface and volume processing. Surface processing includes micromachining, micro- and nanostructuring, and nanoablation, while volume processing includes two-photon polymerization and three-dimensional (3D) processing within transparent materials. Commercial and industrial applications of ultrafast laser processing are also introduced, and a summary of the technology with future outlooks are also given.

Femtosecond laser micromachining can directly fabricate three-dimensional (3D) microfluidic devices integrated with functional microcomponents in glass microchips.

The unique characteristics of ultrafast lasers have rapidly revolutionized materials processing after their first demonstration in 1987. The ultrashort pulse width of the laser suppresses heat diffusion to the surroundings of the processed region, which minimizes the formation of a heat‐affected zone and thereby enables ultrahigh precision micro‐ and nanofabrication of various materials. In addition, the extremely high peak intensity can induce nonlinear multiphoton absorption, which extends the diversity of materials that can be processed to transparent materials such as glass. Nonlinear multiphoton absorption enables three‐dimensional (3D) micro‐ and nanofabrication by irradiation with tightly focused femtosecond laser pulses inside transparent materials. Thus, ultrafast lasers are currently widely used for both fundamental research and practical applications. This review presents progress in ultrafast laser processing, including micromachining, surface micro‐ and nanostructuring, nanoablation, and 3D and volume processing. Advanced technologies that promise to enhance the performance of ultrafast laser processing, such as hybrid additive and subtractive processing, and shaped beam processing are discussed. Commercial and industrial applications of ultrafast laser processing are also introduced. Finally, future prospects of the technology are given with a summary.

Femtosecond laser direct writing is a promising technique for fabricating optofluidic devices since it can modify the interior of glass in a spatially selective manner through multiphoton absorption. The chemical properties of laser-irradiated regions in glass are modified allowing them to be selectively etched by subsequent wet etching using aqueous solutions of etchants such as hydrofluoric (HF) acid. This technique can be used to directly form three-dimensional microfluidic systems. The two-step process can also be used to fabricate free-space optical components such as micromirrors and microlenses inside glass. In addition, femtosecond laser direct writing can alter the optical properties of a substrate to create a wide range of micro-optical components inside glass, including optical waveguides, Mach-Zehnder interferometers, and optical attenuators. The unique ability of femtosecond laser direct writing to simultaneously alter the chemical and optical properties of glass opens up a new avenue for fabricating a variety of optofluidic microchips for biological analysis. Optofluidic microchips fabricated using femtosecond lasers have been used to determine the functions of living microorganisms, determine the concentrations of liquid samples, detect and manipulate single cells, and rapidly screen algae populations. This paper presents a comprehensive review of optofluidic devices for biological analysis fabricated by femtosecond laser processing.

The extremely high peak intensity associated with ultrashort pulse width of femtosecond laser allows us to induce nonlinear interaction such as multiphoton absorption and tunneling ionization with materials that are transparent to the laser wavelength. More importantly, focusing the femtosecond laser beam inside the transparent materials confines the nonlinear interaction only within the focal volume, enabling three‐dimensional (3D) micro‐ and nanofabrication. This 3D capability offers three different schemes, which involve undeformative, subtractive, and additive processing. The undeformative processing preforms internal refractive index modification to construct optical microcomponents including optical waveguides. Subtractive processing can realize the direct fabrication of 3D microfluidics, micromechanics, microelectronics, and photonic microcomponents in glass. Additive processing represented by two‐photon polymerization enables the fabrication of 3D polymer micro‐ and nanostructures for photonic and microfluidic devices. These different schemes can be integrated to realize more functional microdevices including lab‐on‐a‐chip devices, which are miniaturized laboratories that can perform reaction, detection, analysis, separation, and synthesis of biochemical materials with high efficiency, high speed, high sensitivity, low reagent consumption, and low waste production. This review paper describes the principles and applications of femtosecond laser 3D micro‐ and nanofabrication for lab‐on‐a‐chip applications. A hybrid technique that promises to enhance functionality of lab‐on‐a‐chip devices is also introduced.