In this study, reactive magnetron sputtering was applied for preparing NbCN-Ag films with different Ag additions. Ag contents in the as-deposited NbCN-Ag films were achieved by adjusting Ag target power. The composition, microstructure, mechanical properties, and tribological properties were characterized using energy-dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM), high resolution transmission electron microscopy (HRTEM), Raman spectrometry, nano-indentation, and high-temperature sliding wear tests. Results indicated that face-centered cubic (fcc) NbN, hexagonal close-packed (hcp) NbN and fcc Ag, amorphous C and amorphous CN_x phase co-existed in the as-deposited NbCN-Ag films. After doping with 2.0 at.% Ag, the hardness and elastic modulus reached a maximum value of 33 GPa and 340 GPa, respectively. Tribological properties were enhanced by adding Ag in NbCN-Ag films at room temperature. When the test temperature rose from 300 to 500 °C, the addition of Ag was found beneficial for the friction properties, showing a lowest friction coefficient of ~0.35 for NbCN-12.9 at.% Ag films at 500 °C. This was mainly attributed to the existence of AgO_x, NbO_x, and AgNbO_x lubrication phases that acted as solid lubricants to modify the wear mechanism.

Ti–B–N (nc-TiN/ a-BN) composite coatings with various boron contents were deposited by magnetron sputtering. nano-indentation, ball-on-disc dry sliding X-ray diffraction, and, Raman spectroscopy was used in evaluating the compositional, mechanical and tribological properties of these coatings. The corrosion behaviour of the Ti–B–N coatings was assessed by the electrochemical potentiodynamic polarisation method in a 3 mol-% of NaCl solution. The coefficient of friction (CoF) of the coatings initially increased to 1.0 when the test temperature was 200°C, but a further increase in temperature to 700°C resulted in a decrease in the CoF value to ∼0.18 which was due to the presence of Magneli-type Ti _nO_{2 n−1} oxides. In contrast to the CoF, there was a consistent increase in wear rate when the temperature was increased; the highest wear rate was obtained at 700°C. The B incorporated coatings exhibited improvement in both oxidation and corrosion resistance properties.

The barrier properties and diffusion behavior of Cu(Re) alloy films were studied. The films were deposited onto barrierless SiO₂/Si by magnetron sputtering. X-ray diffraction patterns and electric resistivity results proved that the Cu(Re) alloy films without a barrier layer were thermally stable up to 550 °C. Transmission electron microscopy images and energy-dispersive spectrometry employing scanning transmission electron microscopy provided evidence for a self-formed Re-enriched diffusion layer between the Cu(Re) alloy and SiO₂/Si substrate. Furthermore, the chemical states of Re atoms at the Cu(Re)/SiO₂ interface were analyzed by X-ray photoemission spectroscopy. The self-formed diffusion layer was found to be composed of Re metal, ReO, ReO₂ and ReO₃. At 650 °C, the Cu(Re) layer was completely destroyed due to atom diffusion. The low electrical resistivity in combination with the high thermal stability suggests that the Cu(Re) alloy could be the ultimate Cu interconnect diffusion barrier.