With the continuous progress of aerospace, military technology, and marine development, the MEMS resonance pressure sensor puts forward the requirements of not only a wide range but also high sensitivity. However, traditional resonators are hardly compatible with both. In response, we propose a new sensor structure. By arranging the resonant beam and the sensitive diaphragm vertically in space, the new structure improves the rigidity of the diaphragm without changing the thickness of the diaphragm and achieves the purpose of increasing the range without affecting the sensitivity. To find the optimal structural parameters for the sensor sensitivity and range, and to prevent the effects of modal disturbances, we propose a multi-objective optimization design scheme based on the BP and NSGA-II algorithms. The optimization of the structure parameters not only improved the sensitivity but also increased the interference frequency to solve the issue of mode interference. The optimized structure achieves a sensitivity and range of 4.23 Hz/kPa and 1–10 MPa, respectively. Its linear influence factor is 38.07, significantly higher than that of most resonant pressure sensors. The structural and algorithmic optimizations proposed in this paper provide a new method for designing resonant pressure sensors compatible with a wide range and high sensitivity.

This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms. When resonant accelerometers are used in seismic monitoring, automotive safety systems, and navigation applications, high immunity and low cross-axis sensitivity are required. To improve the high immunity of the accelerometer, a coupling structure is introduced. This structure effectively separates the symmetric and antisymmetric mode frequencies of the DETF resonator and prevents mode coupling. To obtain higher detection accuracy and low cross-axis sensitivity, a decoupling structure is introduced. To find the optimal dimensional parameters of the decoupled structure, the BP and NSGA-II algorithms are used to optimize the dimensional parameters of the decoupled structure. The optimized decoupled structure has an axial stiffness of 6032.21 N/m and a transverse stiffness of 6.29 N/m. The finite element analysis results show that the sensitivity of the accelerometer is 59.1 Hz/g (Y-axis) and 59 Hz/g (X-axis). Cross-axis sensitivity is 0.508% (Y-axis) and 0.339% (X-axis), which is significantly lower than most resonant accelerometers. The coupling structure and optimization method proposed in this paper provide a new solution for designing resonant accelerometers with high interference immunity and low cross-axis sensitivity.

The feed-through effect of resonant pressure sensors usually introduces interfering noise signals, leading to the degradation of sensitivity, linearity, and other performances of the sensor test system. A low-noise charge amplifier and its feed-through compensation circuit are designed to realize high-precision measurements. The designed improved charge amplifier has a differential common-source structure as the output buffer stage, which can effectively reduce the output noise of the circuit while increasing the input impedance, thus improving the accuracy of the feed-through compensation coefficient. By establishing the equivalent circuit model of the sensor and analyzing the influence of the feed-through effect on the sensor test, the feed-through compensation circuit is designed to suppress the feed-through signal. Experimental testing of the sensor proves that the designed circuit can effectively suppress the feed-through effect of the sensor. The noise power spectral density of the improved charge amplifier is tested to be 26.74 nV/√Hz, which is a 65% reduction in noise density. The feed-through compensation circuit eliminates the interference frequency of 34,919 Hz introduced by the feed-through capacitor. Additionally, the resonance peak of the intrinsic resonance frequency of the pressure sensor is −40.75 dBV, which is reduced by 8 dBV compared with that before the feed-through compensation. The feed-through compensation circuit effectively reduces the feed-through interference signal of the sensor, improves the measurement accuracy of the test system, and provides technical support for the design of a low-noise, high-precision, stable, and reliable sensor test system.