Fabien Bénédic

Dr. Fabien Bénédic

Laboratory of Process and Materials Sciences, CNRS, Villetaneuse, France
orcid

Research Focus & Metrics

Academic Career Length

29Years (1998-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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1 March 2005 in Diamond and Related Materials
Verified
Journal Article
Closed access
FSF. Silva
F. Silva
Fabien BénédicFabien Bénédic
Fabien Bénédic
PBP. Bruno
P. Bruno
AGA. Gicquel
A. Gicquel

14 May 2004 in Plasma Sources Science and Technology
Verified
Journal Article
Closed access
GLG Lombardi
G Lombardi
Fabien BénédicFabien Bénédic
Fabien Bénédic
FMF Mohasseb
F Mohasseb
KHK Hassouni
K Hassouni
AGA Gicquel
A Gicquel

1 April 2006 in Diamond and Related Materials
Verified
Journal Article
Closed access
TMT. Matrab
T. Matrab
MOHAMED M. CHEHIMIMOHAMED M. CHEHIMI
MOHAMED M. CHEHIMI
JBJ.P. Boudou
J.P. Boudou
Fabien BénédicFabien Bénédic
Fabien Bénédic
JWJ. Wang
J. Wang
JCJ.A. Carlisle
J.A. Carlisle

1 February 2004 in Diamond and Related Materials
Verified
Journal Article
Closed access
Fabien BénédicFabien Bénédic
Fabien Bénédic
MAM.B. Assouar
M.B. Assouar
FMF. Mohasseb
F. Mohasseb
Omar ElmazriaOmar Elmazria
Omar Elmazria
PAP. Alnot
P. Alnot
AGA. Gicquel
A. Gicquel

1 December 2004 in Journal of Applied Physics
Verified
Journal Article
Closed access
PDF file
GLG. Lombardi
G. Lombardi
KHK. Hassouni
K. Hassouni
Fabien BénédicFabien Bénédic
Fabien Bénédic
FMF. Mohasseb
F. Mohasseb
JRJ. Röpcke
J. Röpcke
AGA. Gicquel
A. Gicquel
In this paper Ar∕H2∕CH4 microwave discharges used for nanocrystalline diamond chemical vapor deposition in a bell-jar cavity reactor were characterized by both experimental and modeling investigations. Discharges containing 1% CH4 and H2 percentages ranging between 2% and 7% were analyzed as a function of the input microwave power under a pressure of 200mbar . Emission spectroscopy and broadband absorption spectroscopy were carried out in the UV-visible spectral range in order to estimate the gas temperature and the C2 density within the plasma. Infrared tunable diode laser absorption spectroscopy was achieved in order to measure the mole fractions of carbon-containing species such as CH4 , C2H2 , and C2H6 . A thermochemical model was developed and used in order to estimate the discharge composition, the gas temperature, and the average electron energy in the frame of a quasihomogeneous plasma assumption. Experiments and calculations yielded consistent results with respect to plasma temperature and composition. A relatively high gas temperature ranging between 3000 and 4000K is found for the investigated discharge conditions. The C2 density estimated from both experiments and modeling are quite high compared with what is generally reported in the literature for the same kind of plasma system. It ranges between 1013 and 1014cm−3 in the investigated power range. Infrared absorption measurements and model predictions indicate quite low densities of methane and acetylene, while the atomic carbon density calculated by the model ranges between 1013 and 1015cm−3 . The methane and hydrogen introduced in the feed gas are subject to a strong dissociation, which results in a surprisingly high H-atom population with mole fraction ranging between 0.04 and 0.16. Result analysis shows that the power coupling efficiency would range between 70% and 90%, which may at least explain the relatively high values obtained, as compared with those reported in the literature for similar discharges, for gas temperature and C2 population. The high H-atom densities obtained in this work would indicate that growing nanocrystalline diamond films would experience a very high etching. Simulation results also confirm that sp species would play a key role in the surface chemistry that governs the diamond growth.

1 March 2005 in Diamond and Related Materials
Verified
Journal Article
Closed access
GCG. Cicala
G. Cicala
PBP. Bruno
P. Bruno
Fabien BénédicFabien Bénédic
Fabien Bénédic
FSF. Silva
F. Silva
KHK. Hassouni
K. Hassouni
Giorgio SenesiGiorgio Senesi
Giorgio Senesi