This study empirically investigates the influences of several parameters on surface morphology and etch rate in a high-aspect-ratio silicon etching process. Two function formulas were obtained, revealing the relationship between the controlled parameters and the etching results. All the experiments were conducted on an inductively coupled plasma system, using a Bosch process. The tested trenches’ width ranged from 15 to 1500 µm and their depth ranged from 50 to 500 µm, which covers nearly all the typical sizes of micromechanical devices in practical applications. The controlled parameters are etching chamber pressure, bias power, and gas flow rate. The parameters of surface morphology include sidewall angle, surface roughness, and sidewall condition. We tested how the controlled parameters can influence the surface morphology and etch rate and formulated assumptions to explain those relationships. Meanwhile, we utilized linear regression to obtain experiential function formulas of the relationships among etch depth, structure width, etching time, and passivation time, with a correlation coefficient higher than 0.99. Using these formulas, 12-µm-wide and 377-µm-deep (aspect ratio 31.4) trenches with sidewall angles of 89° were achieved. Additionally, this experience was applied as a critical structure in a gas turbine structure system.

Due to the large surface-area-to-volume ratio, microchannel heat exchangers have a higher heat transfer rate compared with traditional scale heat exchangers. In this study, the optimum microchannel cavity with high heat transfer and low flow resistance is designed to further improve microchannel exchangers’ thermal performance. A three-dimensional laminar flow model, consisting of Navier–Stokes equations and an energy conservation equation is solved and the conjugate heat transfer between the silicon basement and deionized water is taken into consideration. The impact of the shape, aspect ratio, size and spacing of the cavity on the thermal performance of microchannel exchangers are numerically investigated, respectively. The results indicated that the cavity on the sidewall can enhance heat transfer and reduce flow resistance simultaneously, and cavities with a relatively small expansion angle and streamlined edge could enhance thermal performance the most. Based on the conclusions, a new cavity shape is proposed, and the simulation results verify its excellent thermal performance as expected. Furthermore, investigation is performed to figure out the optimum design of the new cavity and the optimal geometric parameters of the cavity under different flow conditions have been obtained in principle for microchannel exchangers’ design.

The application of microchannel heat exchangers is of great significance in industrial fields due to their advantages of miniaturized scale, large surface-area-to-volume ratio, and high heat transfer rate. In this study, microchannel heat exchangers with and without fan-shaped reentrant cavities were designed and manufactured, and experiments were conducted to investigate the flow and heat-transfer characteristics. The impact rising from the radius of reentrant cavities, as well as the Reynolds number on the heat transfer and the pressure drop, is also analyzed. The results indicate that, compared with straight microchannels, microchannels with reentrant cavities could enhance the heat transfer and, more importantly, reduce the pressure drop at the same time. For the ranges of parameters studied, increasing the radius of reentrant cavities could augment the effect of pressure-drop reduction, while the corresponding variation of heat transfer is complicated. It is considered that adding reentrant cavities in microchannel heat exchangers is an ideal approach to improve performance.

We conducted systematic numerical investigations of the flow characteristics within the entrance region of rectangular microchannels. The effects of the geometrical aspect ratio and roughness on entrance lengths were analyzed. The incompressible laminar Navier–Stokes equations were solved using finite volume method (FVM). In the simulation, hydraulic diameters ( $D_h$ ) ranging from 50 to 200 µm were studied, and aspect ratios of 1, 1.25, 1.5, 1.75, and 2 were considered as well. The working fluid was set as water, and the Reynolds number ranged from 0.5 to 100. The results showed a good agreement with the conducted experiment. Correlations are proposed to predict the entrance lengths of microchannels with respect to different aspect ratios. Compared with other correlations, these new correlations are more reliable because a more practical inlet condition was considered in our investigations. Instead of considering the influence of the width and height of the microchannels, in our investigation we proved that the critical role is played by the aspect ratio, representing the combination of the aforementioned parameters. Furthermore, the existence of rough elements obviously shortens the entrance region, and this effect became more pronounced with increasing relative roughness and Reynolds number. A similar effect could be seen by shortening the roughness spacing. An asymmetric distribution of rough elements decreased the entrance length compared with a symmetric distribution, which can be extrapolated to other irregularly distributed forms.

This paper experimentally investigated a transpiration cooling performance of double-laminated and triple-laminated sintered woven wire mesh structures with different porosities and arrangements. Each laminated test piece was made up of two or three layers, and each layer has different porosities and same thickness. The porosities of layers include 25.6%, 37.1%, 46.9%, and 55.1%. All the tests were performed with air. The flow rate and temperature of main flow were kept at 300 kg/hr and 90 °C, respectively. The blowing ratio between the cooling air and main flow approximately varied from 1.2% to 9%. The average surface temperature of test pieces was captured by an infrared thermal imager. The cooling effectiveness for each specimen was calculated and analyzed. Moreover, the pressure drop of several specimens was analyzed with modified Darcy equation. The results showed that the flow behavior agrees well with the modified Darcy equation. The average porosity of the test piece has a great influence on flow behavior, and the air flow direction through a double-laminated porous medium has only slight influence on pressure drop in this study. The results also indicated that the cooling efficiency increases as the average porosity increases. The arrangement of layers affects the transpiration cooling performance, and the cooling efficiency of the laminated model is affected by each laminates together.