Germanium-on-silicon thermo-optic phase shifters are demonstrated in the 5 μm wavelength range. Basic phase shifters require 700 mW of power for a 2π phase shift. The required power is brought down to 80 mW by complete undercut using focused ion beam. Finally an efficient thermo-optic phase shifter is demonstrated on the germanium on SOI platform. A tuning power (for a 2π phase shift) of 105 mW is achieved for a Ge-on-SOI structure which is lowered to 16 mW for a free standing phase shifter.

We experimentally demonstrate extraction of silicon waveguide geometry with subnanometer accuracy using optical measurements. Effective and group indices of silicon-on-insulator (SOI) waveguides are extracted from the optical measurements. An accurate model linking the geometry of an SOI waveguide to its effective and group indices is used to extract the linewidths and thicknesses within respective errors of 0.37 and 0.26 nm on a die fabricated by IMEC multiproject wafer services. A detailed analysis of the setting of the bounds for the effective and group indices is presented to get the right extraction with improved accuracy.

We propose a compact, temperature-insensitive, and all-silicon Mach-Zehnder interferometer filter that uses the polarization-rotating asymmetrical directional couplers. Temperature sensitivity of the filter is for a wavelength range of 30 nm. The device achieves a reduced footprint by making use of different polarizations, which is made possible by the asymmetric directional couplers that act both as a splitter/combiner and as a polarization rotator. Simulation of the device shows that it can also be useful for gas sensing and bio-sensing applications with three times larger response to cladding changes while keeping a thermally robust behavior.

An integrated heterodyne optical phase-locked loop was designed and demonstrated with an indium phosphide based photonic integrated circuit and commercial off-the-shelf electronic components. As an input reference, a stable microresonator-based optical frequency comb with a 50-dB span of 25 nm (~3 THz) around 1550 nm, having a spacing of ~26 GHz, was used. A widely-tunable on-chip sampled-grating distributed-Bragg-reflector laser is offset locked across multiple comb lines. An arbitrary frequency synthesis between the comb lines is demonstrated by tuning the RF offset source, and better than 100Hz tuning resolution with ± 5 Hz accuracy is obtained. Frequency switching of the on-chip laser to a point more than two dozen comb lines away (~5.6 nm) and simultaneous locking to the corresponding nearest comb line is also achieved in a time ~200 ns. A low residual phase noise of the optical phase-locking system is successfully achieved, as experimentally verified by the value of −80 dBc/Hz at an offset of as low as 200 Hz.

We propose a method to make silicon optical finite impulse response filters tolerant to fabrication (waveguide geometry) and ambient thermal variations. We experimentally demonstrate a Mach-Zehnder interferometer filter with fabrication and thermal tolerance, both separately and together. The fabrication-tolerant device measurements show a 20-fold improved tolerance to systematic waveguide linewidth variations with a wavelength shift of <;60 pm/nm linewidth change. The fabrication- and thermal-tolerant device is possible using orthogonal polarizations in the two arms. The fabricated device shows a shift of less than ±65 pm/nm and a thermal drift smaller than ±15 pm/K over a wavelength range of 40 nm. Simulations show that this concept can be extended to multichannel filters.

Optical phased arrays (OPAs) with phase-monitoring and phase-control capabilities are necessary for robust and accurate beamforming applications. This paper demonstrates an on-chip integrated phase calibration system where compact phase interrogator structures and readout photodiodes are implemented within the OPA architecture. This enables phase-error correction for high-fidelity beam-steering with linear complexity calibration. A 32-channel OPA with 2.5-µm pitch is fabricated in an Si–SiN photonic stack. The readout is done with silicon photon-assisted tunneling detectors (PATDs) for sub-bandgap light detection with no-process change. After the model-based calibration procedure, the beam emitted by the OPA exhibits a sidelobe suppression ratio (SLSR) of −11 dB and a beam divergence of 0.97° × 0.58° at 1.55-µm input wavelength. Wavelength-dependent calibration and tuning are also performed, allowing full 2D beam steering and arbitrary pattern generation with a low complexity algorithm.