To produce diffractive or holographic structures in a photolithographic process, an optical projection system enabling structure resolution in the submicrometer range is highly desirable. To ensure that the optical focus of such a system lies on the substrate surface during the whole lithographic fabrication process, an autofocus system able to focus on a depth of field of a few hundred nanometers is usually required. In this work, we developed an autofocus system for spatial light modulator (SLM)-based maskless photolithographic applications. The system is capable of high-precision focusing without affecting the photoresist performance. It is based on contrast measurement combined with focus-pattern illumination to ensure high contrast at the substrate surface. In addition, we evaluated various autofocus algorithms with respect to time efficiency and accuracy to determine suitable focus-pattern and focus-algorithm combinations.

Long-period fiber gratings (LPGs) are well known for their sensitivity to external influences, which make them interesting for a large number of sensing applications. For these applications, fibers with a high numerical aperture (i.e., fibers with highly germanium (Ge)-doped fused silica fiber cores) are more attractive since they are intrinsically photosensitive, as well as less sensitive to bend- and microbend-induced light attenuations. In this work, we introduce a novel method to inscribe LPGs into highly Ge-doped, single-mode fibers. By tapering the optical fiber, and thus, tailoring the effective indices of the core and cladding modes, for the first time, an LPG was inscribed into such fibers using the amplitude mask technique and a KrF excimer laser. Based on this novel method, sensitive LPG-based fiber optic sensors only a few millimeters in length can be incorporated in bend-insensitive fibers for use in various monitoring applications. Moreover, by applying the described inscription method, the LPG spectrum can be influenced and tailored according to the specific demands of a particular application.

To keep pace with the increasing demand of transmission capacity, space division multiplexing technologies are currently intensively investigated. In this context, mode selective glass fiber couplers are of great interest due to their compatibility with existing glass fiber networks. In this work, we present a novel type of mode selective glass fiber coupler for co-directional coupling based on fiber gratings and fused asymmetric fibers. The achieved mode selective coupling efficiency agrees well with numerical simulations performed for comparison. The benefits of the grating approach are a lower mode crosstalk and a simple adaption of the propagation constants through changing of the grating-period. (C) 2019 Optical Society of America