GaSb-based single-transverse-mode narrow ridge waveguide (RW) lasers with high power and simultaneous good beam quality have broad application prospects in the mid-infrared wavelength region. Yet its design and formation have not been investigated systematically, while the beam characteristics that affect their suitability for specific applications remain rarely analyzed and optimized. The present work addresses these issues by theoretically establishing a waveguide parameter domain that generalizes the overall possible combinations of ridge widths and etch depths that support single-transverse-mode operation for GaSb-based RW lasers. These results are applied to develop two distinct and representative waveguide designs derived from two proposed major optimization routes of model gain expansion and index-guiding enhancement. The designs were evaluated experimentally based on prototype 1-mm cavity-length RW lasers in the 1950 nm wavelength range, which were fabricated with waveguides having perpendicular ridge and smooth side-walls realized through optimized dry etching conditions. The model gain expanded RW laser design with a relatively shallow-etched (i.e., 1.55 $$\upmu$$ m) and wide ridge (i.e., 7 $$\upmu$$ m) yielded the highest single-transverse-mode power to date of 258 mW with a narrow lateral divergence angle of 11.1 $$^\circ$$ full width at half maximum at 800 mA under room-temperature continuous-wave operation, which offers promising prospects in pumping and coupling applications. Meanwhile, the index-guiding enhanced RW laser design with a relatively deeply etched (i.e., 2.05 $$\upmu$$ m) and narrow ridge (i.e., 4 $$\upmu$$ m) provided a highly stable and nearly astigmatism-free fundamental mode emission with an excellent beam quality of M $$^2$$ factor around 1.5 over the entire operating current range, which is preferable for seeding external cavity applications and complex optical systems.
We propose a novel graded AlGaAsSb layer growth method to achieve a super-linear interface by precisely controlling the cell temperature and valve position. Atomically smooth surface and lattice-matched epitaxy was confirmed by AFM and the HRXRD characterization of the graded AlGaAsSb layer sample. With the inserted graded layer between the cladding and waveguide layers, high-power, high-efficiency GaSb-based laser emitters and laser bars were confirmed. The linearly graded interface layer smooths the potential barrier peak between the cladding and waveguide layers, which resulted in a low turn-on voltage of 0.65 V and an ultra-low series resistance of 0.144 Ω. A maximum continuous-wave output power of 1.8 W was obtained with a high power conversion efficiency of 28% at 1.1 A and 12% at 8 A. A facet-coated laser bar was also fabricated with a record-high CW output power of 18 W. A high internal quantum efficiency of 83 was maintained at 40 °C, implying improved carrier injection efficiency, which benefits from the built-in electric field of the composition-graded AlGaAsSb layer.
Antimonide laser diodes, with their high performance above room temperature, exhibit significant potential for widespread applications in the mid-infrared spectral region. However, the laser’s performance significantly degrades as the emission wavelength increases, primarily due to severe quantum-well hole leakage and significant non-radiative recombination. In this paper, we put up an active region with a high valence band offset and excellent crystalline quality with high luminescence to improve the laser’s performance. The miscibility gap of the InGaAsSb alloy was systematically investigated by calculating the critical temperatures based on the delta lattice parameter model. As the calculation results show, In0.54Ga0.46As0.23Sb0.77, with a compressive strain of 1.74%, used as the quantum well, is out of the miscibility gap with no spinodal decomposition. The quantum wells exhibit high crystalline quality, as evidenced by distinct satellite peaks in XRD curves with a full width at half maximum (FWHM) of 56 arcseconds for the zeroth-order peak, a smooth surface with a root mean square (RMS) roughness of 0.19 nm, room-temperature photoluminescence with high luminous efficiency and narrow FHWM of 35 meV, and well-defined interfaces. These attributes effectively suppress non-radiative recombination, thereby enhancing internal quantum efficiency in the antimonide laser. Furthermore, a novel epitaxial laser structure was designed to acquire low optical absorption loss by decreasing the optical confinement factor in the cladding layer and implementing gradient doping in the p-type cladding layer. The continuous-wave output power of 310 mW was obtained at an injection current of 4.6 A and a heatsink temperature of 15 °C from a 1500 × 100 μm2 single emitter. The external quantum efficiency of 53% was calculated with a slope efficiency of 0.226 W/A considering both of the uncoated facets. More importantly, the lasing wavelength of our laser exhibited a significant blue shift from 3.4 μm to 2.9 μm, which agrees with our calculated results when modeling the interdiffusion process in a quantum well. Therefore, the interdiffusion process must be considered for proper design and epitaxy to achieve mid-infrared high-power and high-efficiency antimonide laser diodes.
Symmetric narrow waveguide structure has been developed and fabricated to achieve low beam divergence and improved coupling performance of the 1.95 μm GaSb-based single-transverse-mode diode lasers. The near-field expansion effect of the narrowed 150 nm vertical waveguide design leads to a reduced fast-axis beam divergence of 44.2° full width at half maximum (FWHM) as well as 62% single-mode fiber (SMF) coupling efficiency, which has 55% relative promotion compared to the 40% efficiency of the conventional 270 nm waveguide design with 60.4° FWHM. The highest SMF coupling power of 113 mW was obtained by the 210 nm narrow waveguide lasers with lower internal optical loss at a 55% coupling efficiency, which performed balanced optimal performance with a narrowed divergence of 53.4° and a relatively high optical power of 206 mW. The high coupling efficiency and power will provide more promising prospects for the GaSb-based single-transverse-mode lasers in the widespread fiber-based and external-cavity applications.
We reported on a single-longitudinal-mode operated distributed Bragg reflector laser diode emitting at 1950 nm with an on-chip integrated power amplifier. Second-order Chromium–Bragg gratings are carefully designed and fabricated at the end of the ridge waveguide. Achieving a stable single-mode operation with a large injecting current range of 800 mA from 15 °C to 40 °C. The maximum side-mode suppression ratio (SMSR) is up to 42 dB. To increase the output power, an on-chip integrated master oscillator power amplifier (MOPA) is also introduced. MOPA-DBR lasers with different matching configurations between the gain peak and Bragg wavelength are fabricated, resulting in various amplification consequences. The best device is realized with 40 nm red-shifted between Bragg wavelength and photoluminescence (PL) peak. A power amplification of 5.6 times is achieved with the maximum output power of 45 mW. Thus, we put up the feasibility and key design parameters of on-chip integrated power amplification DBR lasers towards mid-infrared.