We present first-principles calculations for fluorine-doped zinc oxide (ZnO:F) by using density-functional theory. Under O-poor condition, fluorine substitution for oxygen $\left({\text{F}}_{\text{O}}\right)$ is energetically favorable in ZnO. ${\text{F}}_{\text{O}}$ can effectively diminish oxygen vacancies. With high fluorine concentration, fluorine interstitial $\left({\text{F}}_{\text{i}}\right)$ may appear. The high transition energies of ${\text{F}}_{\text{O}}$ and ${\text{F}}_{\text{i}}$ suggest that ${\text{F}}_{\text{O}}$ and ${\text{F}}_{\text{i}}$ could act as deep donor and acceptor which cannot provide free carriers in ZnO at room temperature. The increase of carriers and mobility in ZnO:F could not contribute from deep donor ${\text{F}}_{\text{O}}$ , but may be due to the surface passivation effect of fluorine.

Soft-X-ray interference lithography is utilized in combination with atomic layer deposition to prepare photonic crystal structures on the surface of Bi₄Ge₃O₁₂ (BGO) scintillator in order to extract the light otherwise trapped in the internal of scintillator due to total internal reflection. An enhancement with wavelength- and emergence angle-integration by 95.1% has been achieved. This method is advantageous to fabricate photonic crystal structures with large-area and high-index-contrast which enable a high-efficient coupling of evanescent field and the photonic crystal structures. Generally, the method demonstrated in this work is also suitable for many other light emitting devices where a large-area is required in the practical applications.

A high-performance photoelectrochemical (PEC)-type heterojunction-driven solar-blind detector was constructed by atomic layer deposition (ALD) oxygen vacancy-rich amorphous Ga₂O₃ on three-dimensional urchin-like ZnO nanorod arrays (3D V_O-Ga₂O₃/ZnO).

The self-assembled monolayer periodic array of polystyrene spheres conformally coated with TiO₂ layer using atomic layer deposition is designed to obtain a further enhancement of light extraction for LYSO scintillator. The maximum enhancement is 149% for the sample with polystyrene spheres conformally coated with TiO₂ layer, while the enhancement is only 76% for the sample with only polystyrene spheres. Such further enhancement could be contributed from the additional modes forming by TiO₂ layer due to its high refractive index, which can be approved by the simulation of electric field distribution. The experimental results are agreement with the simulated results. Furthermore, the prepared structured layer exhibits an excellent combination with the surface of scintillator, which is in favor of the practical application. Therefore, it is safely concluded that the combination of self-assembly method and atomic layer deposition is a promising approach to obtain a significant enhancement of light extraction for a large area. This method can be extended to many other luminescent materials and devices.