Ruixiang Yan

Mr. Ruixiang Yan


Research Focus & Metrics

Academic Career Length

2Years (2025-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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4 February 2025 in Micromachines
Verified
Journal Article
Open access
PDF file
RYRuixiang Yan
Ruixiang Yan
AJAchilles Ji
Achilles Ji
ALAnyuan Liu
Anyuan Liu
LWLei Wang
Lei Wang
SZSongsong Zhang
Songsong Zhang
With the development of technology, MEMS microphones, which are small-sized and highly uniform, have been applied extensively. To improve their reliability in extreme environment and overcome the constraints of traditional microphones, this article presents a piezoelectric bimorph MEMS microphone using Al0.8Sc0.2N. In the article, the high robustness of piezoelectric microphones and the reasons for choosing Al0.8Sc0.2N as piezoelectric materials are described. The sensitivity of an Al0.8Sc0.2N-based piezoelectric bimorph compared with the traditional structure are revealed through FEA. Subsequently, a lumped element microphone model is constructed and all noise sources are evaluated comprehensively. The difference in output noise caused by different structures is calculated. The designed piezoelectric microphone, which comprises eight triangular cantilever beams, was fabricated on a chip with an area of 900 μm × 900 μm. The sensitivity of the designed microphone achieves 1.68 mV/Pa, with a noise floor of −110 dBA and SNR of 54.5 dB. The acoustic overload point of the microphone stands at 147 dB SPL, and following the impact test, the survival rate was 100%. Compared to traditional MEMS microphones, the microphone achieves a dynamic range of 107.5 dB.