The manipulation and characterization of light polarization states are essential for many applications in quantum communication and computing, spectroscopy, bioinspired navigation, and imaging. Chiral metamaterials and metasurfaces facilitate ultracompact devices for circularly polarized light generation, manipulation, and detection. Herein, we report bioinspired chiral metasurfaces with both strong chiral optical effects and low insertion loss. We experimentally demonstrated submicron-thick circularly polarized light filters with peak extinction ratios up to 35 and maximum transmission efficiencies close to 80% at near-infrared wavelengths (the best operational wavelengths can be engineered in the range of 1.3–1.6 µm). We also monolithically integrated the microscale circular polarization filters with linear polarization filters to perform full-Stokes polarimetric measurements of light with arbitrary polarization states. With the advantages of easy on-chip integration, ultracompact footprints, scalability, and broad wavelength coverage, our designs hold great promise for facilitating chip-integrated polarimeters and polarimetric imaging systems for quantum-based optical computing and information processing, circular dichroism spectroscopy, biomedical diagnosis, and remote sensing applications.

Polarimetric imaging has a wide range of applications for uncovering features invisible to human eyes and conventional imaging sensors. Chip-integrated, fast, cost-effective, and accurate full-Stokes polarimetric imaging sensors are highly desirable in many applications, which, however, remain elusive due to fundamental material limitations. Here we present a chip-integrated Metasurface-based Full-Stokes Polarimetric Imaging sensor (MetaPolarIm) realized by integrating an ultrathin (~600 nm) metasurface polarization filter array (MPFA) onto a visible imaging sensor with CMOS compatible fabrication processes. The MPFA is featured with broadband dielectric-metal hybrid chiral metasurfaces and double-layer nanograting polarizers. This chip-integrated polarimetric imaging sensor enables single-shot full-Stokes imaging (speed limited by the CMOS imager) with the most compact form factor, records high measurement accuracy, dual-color operation (green and red) and a field of view up to 40 degrees. MetaPolarIm holds great promise to enable transformative applications in autonomous vision, industry inspection, space exploration, medical imaging and diagnosis.

Flat optics presents a new path to control the phase, amplitude, and polarization state of light with ultracompact devices. Here we demonstrate chip-integrated metasurface devices for polarization detection of mid-infrared light with arbitrary polarization states. Six high-performance microscale linear and circular polarization filters based on vertically stacked plasmonic metasurfaces (with total thickness $<600\mathrm{nm}$) are integrated on the same chip to obtain all four Stokes parameters of light with high accuracy. The device designs can be tailored to operate at any wavelength in the mid-infrared spectral region and are feasible for on-chip integration with mid-infrared (mid-IR) photodetectors and imager arrays. Our work will enable on-chip mid-IR polarimeters and polarimetric imaging systems, which are highly desirable for many applications, such as clinical diagnosis, target detection, and space exploration.

We introduce a method to fabricate solid-state nanopores with sub-20 nm diameter in membranes with embedded metal electrodes across a 200 mm wafer using CMOS compatible semiconductor processes. Multi-layer (metal–dielectric) structures embedded in membranes were demonstrated to have high uniformity (±0.5 nm) across the wafer. Arrays of nanopores were fabricated with an average size of 18 ± 2 nm in diameter using a Reactive Ion Etching (RIE) method in lieu of TEM drilling. Shorts between the membrane-embedded metals were occasionally created after pore formation, but the RIE based pores had a much better yield (99%) of unshorted electrodes compared to TEM drilled pores (<10%). A double-stranded DNA of length 1 kbp was translocated through the multi-layer structure RIE-based nanopore demonstrating that the pores were open. The ionic current through the pore can be modulated with a gain of 3 using embedded electrodes functioning as a gate in 0.1 mM KCl aqueous solution. This fabrication approach can potentially pave the way to manufacturable nanopore arrays with the ability to electrically control the movement of single or double-stranded DNA inside the pore with embedded electrodes.